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Properties of Films Prepared from Low Surface Area/Density Alumina-Silica

  • S.L. Hietala (a1), D.M. Smith (a1), V.M. Hietala (a2), G.C. Frye (a2), A.J. Hurd (a2) and C.J. Brinker (a2)...

Abstract

A sol-gel method was used to prepare bulk, closed pore, amorphous alumina-silica. Films prepared from this 47wt% A12O3-SiO2 composition were examined by SAW, ellipsometry and electrical measurements. The films were found to have a surface area of 1.1 cm2/cm2, a refractive index of 1.44 at 633 nm, and a relative permittivity of 6.2 at 200 KHz. These properties indicate potential applications as hermetic seals, barrier coatings, dielectric layers for capacitors and passivation coatings for electronic circuits.

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1. Hietala, S.L., Smith, D.M., Golden, J.L. and Brinker, C.J., J. Amer. Cer. Soc. 721, 2354 (1989).
2. Hietala, S.L., Smith, D.M., Brinker, C.J., Hurd, A.J., Dando, N. and Carim, A.H.. J. Amer. Cer. Soc. in press (1990).
3. Glaves, C.L., Frye, G.C., Smith, D.M., Brinker, C.J., Datye, A., Ricco, A.J. and Martin, S.J., Langmuir 5. 459 (1989).
4. Pouxviel, J.C. and Boilot, J.P. in Ultrstrueture Proceesing of Advanced Ceramics, edited by Mackenzie, J.D. and Ulrich, D.R. (1988) pp. 197–209.
5. Kingery, W.D., Bowman, H.K. and Uhlmann, D.R., Introduction to Ceramic, 2nd ed. (John Wiley & Sons, 1976) chapter 18.
6. Weast, R.C., ed., CRC Handhook of Chemistry and Physics, 63rd ed. (CRC press, 19821983) p. B-143
7. Wefers, K. and Bell, G.N., Technical Paper #19. Alcoa Research Laboratories, 1972.

Properties of Films Prepared from Low Surface Area/Density Alumina-Silica

  • S.L. Hietala (a1), D.M. Smith (a1), V.M. Hietala (a2), G.C. Frye (a2), A.J. Hurd (a2) and C.J. Brinker (a2)...

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