Skip to main content Accessibility help
×
Home

Properties and Effects of Laser-Induced Plasma During Evaporative Deposition of Thin Films

  • H. Sankur (a1), J. Denatale (a1) and W. J. Gunning (a1)

Abstract

The properties of plasmas generated by the interaction of a pulsed CO2 laser with several solid evaporation targets were studied and the films deposited from such plasmas were characterized. A large flux (˜ 1014/cm2/s) of ions at high velocities (2 − 10 × 106 cm/s) was measured in these plasmas. ZrO2 thin films deposited by laser-assisted evaporation on room temperature substrates had crystalline-oriented structures. Low optical absorption and high refractive index values (2.15 at 632.8 nm) indicated the stoichiometric and dense nature of these films.

Copyright

References

Hide All
R1. Cheung, J., Mat. Res. Symp. Proceed 29, 301 (1983).
R2. Sankur, H., Nelson, J.G., Pritt, A.T. Jr, Gunning, W.J., J. Vac. Sci. Tech. A5, 15 (1987).
R3. Akhsakalyan, A., Bityurin, Yu. A., Gaponov, S.V., Gudkov, A.A., Luchin, V.I., Sov. Phys. Tech. Phys. 27, 969 (1982).
R4. Lubben, D., Barnett, S.A., Suzuki, K., Gorbatkin, S., Greene, J.T., J. Vac. Sci. Tech. B3, 968 (1985).
R5. Smith, O., Baumeister, P., Appl. Optics 18, 111 (1979).
R6. Martin, P.J., Netterfield, R.P., Sainty, W.G., J. App. Phys. 55, 235 (1984).

Properties and Effects of Laser-Induced Plasma During Evaporative Deposition of Thin Films

  • H. Sankur (a1), J. Denatale (a1) and W. J. Gunning (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed