Skip to main content Accessibility help

Preferential Growth of CoSi2 in Co/Si Solid State Interaction by Rapid Thermal Annealing

  • Ping Liu (a1), Feng Hong (a1), Bing-Zong Li (a1) and Xiao-Liang Sheng (a2)


The CoSi2 thin film growth by Co/Si solid state interaction was investigated. The electrical and crystal properties of the films formed on (111) and (100) Si substrates were characterized after a rapid thermal annealing. A strong preferential CoSi2 (111) orientation grain growth was observed on (111)Si substrate. The formed CoSi2 film was highly conductive with a resistivity of 15.5 µΩ · cm.



Hide All
1 Liu, R., Baiochi, F.A., Heimbrook, L.A., Kovalchick, J., Melm, D.L., Williams, D.S., and Lynch, W.T., ULSI Science and Technology, edited by Broydo, S. and Osburn, C.M. (The Electrochemical Society, Inc., Pennington, N.J. 1987), p.446.
2 Liu, R., Williams, D.S., and Lynch, W.T., IEDM Tech. Dig. 1986, p. 58.
3 Hillenius, S.J., Liu, R., Georgion, G.E., Field, R.J., Williams, D.S., Kornblit, A., Boulin, D.M., Johnston, R.L., and Lynch, W.T., IEDM Tech. Dig. 1986, p. 252.
4 Van den hove, L., Wolters, R., Maex, K., De Keersmaecker, R., and Declerck, G., J. Vac. Sci. Technol. B 4 (6), 1358 (1986); IEEE Trans. Electron Devices, ED-34, 554 (1987).
5 Tabasky, M., Bulat, E.S., Ditchek, B.M., Sullivan, M.A., and Shatas, S.C., IEEE Trans. Electron Devices, ED–34, 548 (1987).
6 Morgan, A.E., Broadbeut, E.K., Delfino, M., Coulman, B., and Sadaue, D.K., J. Electrochemical Society, 134, 925 (1987).
7 Murarka, S.P., Fraser, D.B., Sinha, A.K., Levinstein, H.J., Lloyd, E.J., Liu, R., Williams, D.S., and Hillenius, S.J., IEEE Trans. Electron Devices, ED–34, 2108 (1987).
8 Hensel, J.C., Levi, A.F.J., Tung, R.T., and Gibson, J.M., Appl. Phys. Lett. 47 (2), 151 (1985).
9 Ishibashi, K. and Furukawa, S., IEEE Trans. Electron Devices, ED–33, 322 (1986).
10 Joint Committee on Powder Diffraction Standards, No.8-344.
11 Van Ommen, A.H., Bulle-Lieuwma, C.W.T., and Langereis, C., J. Appl. Phys. 64 (5), 2706 (1988).


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed