Skip to main content Accessibility help
×
Home

Post Epitaxial Disordering of CuPtB Ordered AIGaInP/GaInP for Microstructuring

  • M. Bukard (a1), A. Englert (a1), C. Geng (a1), F. Scholz (a1) and H. Schweizer (a1)...

Abstract

Lateral order/disorder structures have been fabricated out of ordered GaInP quantum wells by ion implantation.

Using high resolution electron beam lithography for definition of implantation masks, we achieve wire structures down to 35nm width. Implantation was carried out at energies down to 25keV and doses from 3e10cm−2 to 6e13cm−2. The so created vacancies lead to a reduction of the disordering temperature threshold of about 850°C for mere thermal disordering. Annealing those structures at 800°C results in selective disordering in the unmasked regions. We have ordered wire structures within disordered barriers. Even for the smallest mask widths of 35nm, the PL emission of wires and barriers are well resolved.

Copyright

References

Hide All
[1] Gomyo, A., Suzuki, T., Kobayashi, K., Kawata, S., Hino, I. and Yuasa, T., Appl. Phys. Lett. 50, p. 673 (1987).
[2] Ernst, P., Geng, C., Scholz, F., Schweizer, H.; Appl. Phys. Lett. 67, p. 2347 (1995).
[3] Geng, C., Moser, M., Winterhoff, R., Lux, E., Hommel, J., Höhing, B., Schweizer, H., Scholz, F.;J. Cryst. Growth 145, p. 740 (1994).
[4] Wei, S.-H., Zunger, A.; Phys. Rev. B 39, p. 3279 (1989).
[5] Maeder, K.A., Zunger, A.; Phys. Rev. B 51, p. 10462 (1995).
[6] Ueno, Y., Fuji, H., Kobayashi, K., Endo, K., Gomyo, A., Hara, K., Kawata, S., Yuasa, T., Suzuki, T.; Japan. Journ. of Appl. Phys. 29 (1990) L1666.
[7] Hommel, J., Höhing, B., Geng, C., Kessler, M., Haase, D., Scholz, F., Schweizer, H.; Int. Conf. on Micro- and Nano Engineering (1994) Davos (Switzerland); Microelectronic Engineering
[8] Ernst, P., Geng, C., Hahn, G., Phillipp, F., Scholz, F., Schweizer, H.; J. Appl. Phys., accepted
[9] DeLong, M.C., Taylor, P.C., Olson, J.M.; Appl. Phys. Lett. 57, p. 620 (1990).
[10] Ernst, P., Geng, C., Scholz, F., Schweizer, H.; Phys. Stat. Sol. (b) 14, Vol.193 No. 1 (1996).
[11] Ziegler, J.F., Biersack, J.P., Littmark, U.; The Stopping and Range of Ions in Solids, Vol.4, Pergamon Press (1985).

Related content

Powered by UNSILO

Post Epitaxial Disordering of CuPtB Ordered AIGaInP/GaInP for Microstructuring

  • M. Bukard (a1), A. Englert (a1), C. Geng (a1), F. Scholz (a1) and H. Schweizer (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.