Skip to main content Accessibility help

Planarization with Cyclotene™ 3022 (BCB) Polymer Coatings

  • T.M. Stokich (a1), C.C. Fulks (a1), M.T. Bernius (a1), D.C. Burdeaux (a1), P.E. Garrou (a2) and R.H. Heistand (a3)...


This work examines the planarization of polymer thin film coatings derived from Cyclotene™ 3022 prepolymer resins. Cyclotene™ 3022 is a divinyl siloxane bis-benzocyclobutene prepolymer (DVS-BCB, CAS 117732-87-3). It is used primarily as a dielectric in microelectronics applications.

Using profilometry, planarization measurements have been made on thin films spun over features consisting of lines and trenches. Feature widths have been varied from 2 to 1000 μm and the feature depths and film thickness have been varied from 1 to 16 μm. Effects of the processing procedure, resin concentration and resin additives have been explored. Local (versus global) planarization will be discussed.

Planarization has been found to depend on all feature dimensions and the polymer film thickness. Lines or other structures having a width of 100 μm or less can be planarized to 90% or better with standard commercial formulations of Cyclotene™ 3022, provided that the mean film thickness is twice the line-height or feature-depth. Metals such as Al, Cu, Cr and Ti can all be planarized to this degree; however, surface preparations may influence the result.



Hide All
1 Skidmore, K, "Techniques for Planarizing Device Topography", Semiconductor International, 1988(4), 114.
2 Singer, P, "Searching for Perfect Planarity", Semiconductor International, 1992(3), 44.
3 Tummala, R and Rymaszewski, E editors, Microelectronic Packaging Handbook, Van Nostrand Reinhold, 1989.
4 Garrou, PE, "Polymer Dielectrics for Multichip Module Processing", Proc. IEEEE, 80, 1992, 1942.
5 Perettie, D, Burdeaux, DC, McCulloch, MF and Garrou, PE, Proc. SPIE, San Jose, 1992, 1665.
6 Rothman, LB, "Properties of Thin Polyimide Films", J. Electrochem Soc. - Solid State Science and Technology, 1980, 2216.
7 Day, DR, Ridley, D, Mario, J and Senturia, SD, "Polyimide Planarization in Integrated Circuits", Polyimides, Mittel, KL editor, Plenum Press, 1984, 767.
8 Chao, C and Wang, WV, "Planarization Enhancement of Pi's by Dynamic Curing and the Effect of Multiple Coating", Polyimides, Mittel, KL editor, Plenum Press, 1984, 783.
9 Wilson, AM, "Use of Polyimides in VLSI Fabrication", Polyimides, Mittel, KL editor, Plenum Press, 1984.
10 Weber, WD and Gupta, MR, "Molecular Weight/Property Relationships in a Series of Polyimide Copolymers", Recent Advances in Polyimide Science and Technology, Weber, WD and Gupta, MR editors, Soc. Plastics Eng., 1987, 214.
11 Burdeaux, DC, Townsend, PH, Carr, JN and Garrou, PE, J Electronic Materials, 19, 1990, 1357.
12 Fong, S, Keister, FZ and Peters, JW, Proc. 22nd SAMPE, 1990, 602.
13 Sherrima, FA, Sadaat, IA, SSikigahama, , Abado, AA, O'Brien, J and Thomas, M, Proc. ISHM, San Francisco, 1992, 596.
14 Shimoto, T, Matsui, K, Kimura, M and Utsumi, K, Proc. 7th Int. Microelectronics Conf., Yokohama, 1992, 325.
15 Tessier, TG, Proc. 6th Int. SAMPE Electronics Conf., Baltimore, 1992, 347.
16 Kirchhoff, RA, U.S. 4,540,763 (Sept 10, 1985).
17 Heistand, RH, DeVellis, R, Manial, T, Stokich, TM, Townsend, PH, Garrou, PE, Takahashi, T, Adema, G, Berry, M and Turlik, I, Int. Microelectronics and Packaging, 15, 1992, 183.
18 Stokich, TM, Lee, WM and Peters, RA, Mat. Res. Soc. Proc., 227, 1991, 103114.
19 Dibbs, MG, Townsend, PH, Stokich, TM, Huber, BS, Mohler, CE, Heistand, RH, Garrou, PE, Adema, GM, Berry, MJ and Turlik, I, "Cure Management of Benzoyclobutene Dielectric for Electronic Applications", Proc. of the 6th Int. SAMPE Electronic Materials and Processes (June 23-25, 1992).
20 Garrou, PE, Heistand, RH, Dibbs, M, Manial, TA, Mohler, C, Stokich, T, Townsend, PH, Adema, GM, Berry, MJ anf Turlik, I, 42nd Electronics Components Tech. Conf. May 1992.

Related content

Powered by UNSILO

Planarization with Cyclotene™ 3022 (BCB) Polymer Coatings

  • T.M. Stokich (a1), C.C. Fulks (a1), M.T. Bernius (a1), D.C. Burdeaux (a1), P.E. Garrou (a2) and R.H. Heistand (a3)...


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.