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Piezoresponse in Ferroelectric PZT Thin Films

Published online by Cambridge University Press:  26 February 2011

Dmitry Kiselev ,
Igor Bdikin ,
Alena Movchikova ,
Andrei Kholkin ,
Gunnar Suchaneck  and
Gerald Gerlach
Dmitry Kiselev
Affiliation:
dmitry@cv.ua.pt, University of Aveiro, Dept. of Ceramics and Glass Engineering, Campus de Santiago, Aveiro, 3810-193, Portugal
Igor Bdikin
Affiliation:
ibdikin@cv.ua.pt, University of Aveiro, Dept. of Ceramics and Glass Engineering, Aveiro, 3810-193, Portugal
Alena Movchikova
Affiliation:
alena-ftf@mail.ru, Technische Universitaet Dresden, Institute for Solid State Electronics, Dresden, 01069, Germany
Andrei Kholkin
Affiliation:
kholkin@cv.ua.pt, University of Aveiro, Dept. of Ceramics and Glass Engineering, Aveiro, 3810-193, Portugal
Gunnar Suchaneck
Affiliation:
suchanec@rcs.urz.tu-dresden.de, Technische Universitaet Dresden, Institute for Solid State Electronics, Dresden, 01069, Germany
Gerald Gerlach
Affiliation:
suchanec@rcs.urz.tu-dresden.de, Technische Universitaet Dresden, Institute for Solid State Electronics, Dresden, 01069, Germany
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Abstract

Poled ferroelectric lead zirconate titanate (PZT) films comprising a (111) texture on (100)Si/SiO2/(111)Pt substrates were investigated by piezoresponse force microscopy (PFM). Depending on the film thickness, the crystallite orientation varies from purely (111) (related to the Pt bottom electrode orientation) to a more random texture. By PFM, 90° domains with a width of 50 nm were obtained in an individual grain Pb(Pb0.10Zr0.21Ti0.69)O3 − PPZT (10/21/69). It was shown that the virgin (unpoled) films possess large piezoelectric activity comparable to that after local poling (self-polarization effect). This corresponds to a clear predominance of the domains with a polarization oriented from the bottom electrode to the free surface of the film.

Keywords

scanning probe microscopy (SPM)thin filmpiezoresponse
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 966: Symposium T – Ferroelectrics and Multiferroics , 2006 , 0966-T07-02
Copyright
Copyright © Materials Research Society 2007

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References

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