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Phase Transformations Induced by Arsenic Implants into Silicon

  • James P. Lavine (a1), David D. Tuschel (a2) and Donald L. Black (a2)

Abstract

Micro-Raman spectroscopic investigations of arsenic-implanted silicon show lines characteristic of silicon crystallites even at implant doses above the amorphization threshold. The intensity and frequency of occurrence of the lines increase with the implanted dose. Polarization/orientation Raman studies indicate the crystallites are silicon in the hexagonal phase (Si-IV) and silicon in the diamond phase (Si-I). The latter are oriented differently than the substrate silicon. Monte Carlo simulations of the arsenic ion energy loss and published molecular dynamics studies suggest that each arsenic ion deposits sufficient energy to locally melt the silicon lattice. This is taken as the basis of the present attempt to explain the origin of the crystallites. A one-dimensional numerical model is developed to determine the time scale for the liquid silicon to solidify. The effect of amorphous silicon on the solidification is also investigated.

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Phase Transformations Induced by Arsenic Implants into Silicon

  • James P. Lavine (a1), David D. Tuschel (a2) and Donald L. Black (a2)

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