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Persistent Electronic Conduction in 12CaO7Al2O3 Thin Films Produced by Ar Ion Implantation: Selective Kick-Out Effect Leads to Electride Thin Films

  • Masashi Miyakawa (a1), Katsuro Hayashi (a1), Yoshitake Toda (a1) (a2), Toshio Kamiya (a1) (a2), Masahiro Hirano (a1) and Hideo Hosono (a1) (a2)...

Abstract

A new method to convert 12CaO7Al2O3 (C12A7) thin films to electronic conductor by hot Ar+ ion implantation has been developed and its mechanism is discussed. It was found that hot Ar+ ion implantation extruded free O2- ions in C12A7 films by kick-out effects at fluences higher than 1×1017 cm−2, which left electrons in the cages embedded in C12A7 crystal and produced high concentration F+-like centers (∼1.4×1021 cm−3). The resulting films show coloration and persistent electronic conduction with conductivities up to ∼1 Scm−1. On the other hand, fluences less than 1×1017 cm−2 kept the films transparent and insulating.

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Persistent Electronic Conduction in 12CaO7Al2O3 Thin Films Produced by Ar Ion Implantation: Selective Kick-Out Effect Leads to Electride Thin Films

  • Masashi Miyakawa (a1), Katsuro Hayashi (a1), Yoshitake Toda (a1) (a2), Toshio Kamiya (a1) (a2), Masahiro Hirano (a1) and Hideo Hosono (a1) (a2)...

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