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Orientation Selection and Microstructural Evolution of Epitaxial Pt Films on (001) MgO

Published online by Cambridge University Press:  21 February 2011

Paul C. McIntyre ,
Carl J. Maggiore  and
Michael Nastasi
Paul C. McIntyre
Affiliation:
Materials Science and Technology Division, Los Alamos National Laboratory, Los Alamos, NM 87545
Carl J. Maggiore
Affiliation:
Materials Science and Technology Division, Los Alamos National Laboratory, Los Alamos, NM 87545
Michael Nastasi
Affiliation:
Materials Science and Technology Division, Los Alamos National Laboratory, Los Alamos, NM 87545
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Abstract

Thin platinum films were deposited at several different deposition rates and with varying thickness on (OOl)-cut MgO single crystal substrates by electron beam evaporation. A mixture of two epitaxial Pt orientations were detected in the films by X-ray diffraction and planar ion channeling experiments: (001) [100] Pt // (001) [100] MgO (the “cube-on-cube” orientation) and (111) [110] Pt // (001) [110] MgO. The effect of deposition rate on film orientation indicated the (111) Pt orientation was preferred under conditions of high driving force for nucleation. The volume fraction of the films occupied by the (111) orientation increased with nominal film thickness, at a constant substrate temperature and deposition rate. This result indicates crystallites having the (111) Pt orientation grew more quickly following nucleation than the (001). The mosaic spread of the Pt orientations decreased markedly as the nominal film thickness increased from ∼ 1.5 nm (isolated islands) to 20 nm (continuous film).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 355: Symposium B1 – Evolution of Thin-Film and Surface Structure and Morphology , 1994 , 335
Copyright
Copyright © Materials Research Society 1995

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References

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