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Optimized Materials Properties for Organosilicate Glasses Produced by Plasma-Enhanced Chemical Vapor Deposition

  • M.L. O'Neill (a1), R.N. Vrtis (a1), J.L. Vincent (a1), A.S. Lukas (a1), E.J. Karwacki (a1), B.K. Peterson (a1) and M.D. Bitner (a1)...

Abstract

In this paper we examine the relationship between precursor structure and material properties for films produced from several leading organosilicon precursors on a common processing platform. Results from our study indicate that for the precursors tested the nature of the precursor has little effect upon film composition but significant impact on film structure and properties.

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Optimized Materials Properties for Organosilicate Glasses Produced by Plasma-Enhanced Chemical Vapor Deposition

  • M.L. O'Neill (a1), R.N. Vrtis (a1), J.L. Vincent (a1), A.S. Lukas (a1), E.J. Karwacki (a1), B.K. Peterson (a1) and M.D. Bitner (a1)...

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