Skip to main content Accessibility help
×
Home

Optical Properties of Microcrystalline Silicon

  • Martin Ingels (a1), Martin Stutzmann (a1) and Stefan Zollner (a1)

Abstract

Optical properties of undoped, microcrystalline silicon are investigated by photothermal deflection spectroscopy, spectroscopic ellipsometry and Raman scattering. Samples are prepared by recrystallization of hydrogenated amorphous silicon in the temperature range 680 – 900°C. The increase of grain sizes with increasing annealing temperature and the disappearance of amorphous tissue lead to noticeable changes in the observed spectra. It is argued that much of the pertinent structural information of μc-Si can be obtained by a suitable combination of optical measurements alone.

Copyright

References

Hide All
[1] Iqbal, Z., Vepřek, S., J. Phys. C 15, 377 (1982).
[2] Mishima, Y., Miyazaki, S., Hirose, M., Osaka, Y., Phil. Mag. B 46, 1 (1982).
[3] Johnson, N.M., Ready, S.E., Boyce, J.B., Doland, C.D., Wolff, S.H., Walker, J., Appl. Phys. Lett. 53, 1626 (1988).
[4] Kumar, S., Pandya, D.K., Chopra, K.L., J. Appl. Phys. 63, 1497 (1988).
[5] Logothetidis, S., J. Appl. Phys. 65, 2416 (1989).
[6] Jackson, W.B., Amer, N.M., Boccara, A.C., Fournier, D., Appl. Optics 20, 1333 (1981).
[7] Aspnes, D.E., Studna, A.A., Appl. Optics 14, 220 (1975).
[8] Hachicha, M.A., Bustarret, E., this volume.
[9] Jackson, W.B., Johnson, N.M., Biegelsen, D.K., Appl. Phys. Lett. 43, 195 (1983).
[10] Hasegawa, S., Takenaka, S., Kurata, Y., J. Appl. Phys. 53, 5022 (1982).
[11] Stutzmann, M., Herrero, C.P., Ingels, M., Breitschwerdt, A., this volume.
[12] Campbell, I.H., Fauchet, P.M., Solid State Commun. 58, 739 (1986).
[13] Lautenschlager, P., Garriga, M., Viña, L., Cardona, M., Phys. Rev. B 36, 4821 (1987).

Optical Properties of Microcrystalline Silicon

  • Martin Ingels (a1), Martin Stutzmann (a1) and Stefan Zollner (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed