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Ohmic Contacts to GaAs

  • Norman Braslau (a1)


The present capability of obtaining ohmic contacts to GaAs over a range of doping levels is reviewed. Possible models of transport across the metalsemiconductor interface are discussed and contact techniques are described. The widely used Au—Ge alloyed contact is seen to have a spatially inhomogeneous interface which appears to control its contact resistance. The most satisfactory process at this time is to alloy into a previously fabricated heavily doped layer.



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1 Cowley, A. M. and Sze, S. M.,J. Appl. Phys., 36 (1965) 3212.
2 Sharma, B. L., in Willardson, R. K. and Beer, A. C. (eds.), Semiconductors and Semimetals, Vol. 15, Academic Press, New York, 1981, p. 1.
3 Crowell, C. R. and Rideout, V. L., Solid-State Electron., 12 (1969) 55.
4 Chang, C. Y., Fang, Y. K. and Sze, S. M., Solid-State Electron., 14 (1971) 541.
5 Barnes, P. A. and Cho, A. Y., Appl. Phys. Lett., 33 (1978) 651.
6 Braslau, N., J. Vac. Sci. Technol., 19 (1981) 803.
7 Pruniaux, B. R., J. Appl. Phys., 42 (1971) 3575.
8 Madams, C. J., Morgan, D. V. and Howes, M. J., Electron. Lett., 11 (1975) 574.
9 Sebestyen, T., Solid-State Electron., 25 (1982) 543.
10 Riben, A. R. and Feucht, D. L., Int. J. Electron., 20 (1966) 583.
11 Woodall, J. M., Freehouf, J. L., Pettit, G. D., Jackson, T. and Kirchner, P., J. Vac. Sci. Technol., 19 (1981) 626.
12 Stall, R., Wood, C. E. C., Board, K. and Eastman, L. F., Electron. Lett., 15 (1979) 800.
13 Dill, F. H., personal communication, 1981.
14 Braslau, N., Gunn, J. B. and Staples, J. L., Solid-State Electron., 10 (1967) 381.
15 Ohata, K. and Ogawa, M., Proc. 12th Annu. Reliability Physics Symp., IEEE, New York, 1974, p. 278.
16 Eckhardt, G., in White, C. W. and Peercy, P. S. (eds.), Laser and Electron Beam Processing of Materials, Academic Press, New York, 1980, p. 467.
17 Ogawa, M., J. Appl. Phys., 51 (1980) 406.
18 Freehouf, J. L., Jackson, T. N., Laux, S. E. and Woodall, J. M., J. Vac. Sci. Technol., 21 (1982) 570.
19 Cox, R. H. and Strack, H., Solid-State Electron., 10 (1967) 1213.
20 Berger, H. H., Solid-State Electron., 15 (1972) 145.
21 Reeves, G. K. and Harrison, H. B., IEEE Electron Devices Lett., 3 (1982) 111.
22 Immorlica, A. A., Decker, D. R. and Hill, W. A., IEEE Trans. Electron Devices, 27 (1980) 2285.

Ohmic Contacts to GaAs

  • Norman Braslau (a1)


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