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Observation of Quantum Size Dependent Blue Shift in the Luminescence of Recrystallized Si/SiNx Superlattices

Published online by Cambridge University Press:  28 February 2011

D.A. Grützmacher ,
E.F. Steigmeier ,
H. Auderset ,
R. Morf ,
B. Delley  and
R. Wessicken
D.A. Grützmacher
Affiliation:
Paul Schemer Institute, Lab. for Micro and Nanostructures, CH-5232 Villigen/PSI Switzerland
E.F. Steigmeier
Affiliation:
Paul Schemer Institute, Lab. for Micro and Nanostructures, CH-5232 Villigen/PSI Switzerland Paul Scherrer Institute, Badenerstr. 568, CH-8048 Zürich, Switzerland
H. Auderset
Affiliation:
Paul Schemer Institute, Lab. for Micro and Nanostructures, CH-5232 Villigen/PSI Switzerland Paul Scherrer Institute, Badenerstr. 568, CH-8048 Zürich, Switzerland
R. Morf
Affiliation:
Paul Schemer Institute, Lab. for Micro and Nanostructures, CH-5232 Villigen/PSI Switzerland Paul Scherrer Institute, Badenerstr. 568, CH-8048 Zürich, Switzerland
B. Delley
Affiliation:
Paul Schemer Institute, Lab. for Micro and Nanostructures, CH-5232 Villigen/PSI Switzerland Paul Scherrer Institute, Badenerstr. 568, CH-8048 Zürich, Switzerland
R. Wessicken
Affiliation:
Paul Schemer Institute, Lab. for Micro and Nanostructures, CH-5232 Villigen/PSI Switzerland Swiss Federal Institute of Technology, Lab. for Solid State Physics, Zürich, Switzerland
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Abstract

Light emitting Si nanostructures were fabricated by recrystallizing Si/SiNx superlattices grown by plasma enhanced chemical vapor deposition. After recrystallisation by a laser annealing or by rapid thermal annealing the Raman spectra show clearly a confinement effect. A substantial photoluminescence around 470 to 550 nm and at 620 nm is observed after a hydrogen passivation step. The photoluminescence at 620 nm is assigned to carrier recombination via efficient surface states, whereas the blue emission at 470 to 550 nm shows a behaviour expected for quantum confinement effects.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 358: Symposium F – Microcrystalline and Nanocrystalline Semiconductors , 1994 , 833
Copyright
Copyright © Materials Research Society 1995

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References

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