Skip to main content Accessibility help

Observation of Damage Structures in Proton-Implanted Gallium Arsenide by Cross-Sectional Tem

  • D Loretto (a1), G. T. Brown (a2) and I. P. Jones (a1)


Semi-insulating and SI-doped <100> GaAs have been irradiated to a dose of 1016 protons cm−2. Samples have been annealed for 20 minutes at 400,500 and 600°C. Cross-sectional TEN has shown the as-implanted and 400°C annealed GaAs to contain no visible damage. After 500 and 600°C anneals a heterogeneous distribution of planar raft-like defects apears on {(11} and {110}. The density of these defects is much lower in the Si-doped material.



Hide All
1. Speight, J.D., O'Sullivan, P., Leigh, P.A., McIntyre, N.M., Cooper, K. and O'Hara, S., IOP conf. ser. No. 33a, GaAs and related canpounds (Edinburgh) 1976, edited by Hilsum, C.,(IOP, Bristol, 1977), p. 275.
2. Liou, L.L., Spitzer, W.G., Zavada, J.M. and Jenkinson, H.A., J. Appl. Phys. 59, 1936 1986.
3. Lang, D.V., IOP Conf. ser. No. 31, Radiation effects in semiconductors 1976, edited by Urli, N.B. and Corbett, J.W., (IOP, Bristol, 1977), p. 74.
4. Dannefaer, S. and Kerr, D., J. Appl. Phys. 60, 591 1986.
5. Matsamura, H. and Stephens, K.G., J. Appl. Phys. 48, 2779 1977.
6. Newman, R.C. and Woodhead, J., Rad. Effs. 53, 41 1980.
7. Neethling, J.H., Snyman, H.C. and C.Ball, A.B., Proc. 13th Int. Conf. on Defects in Semiconductors (Coronado Calif., 1984), eds. Kimmerling, L.C. and Parsey, J.M. jr., (Metallurgical soc. of AIME, 1985), pp. 427-433.
8. Sadana, D.K., Zavada, J.M., Jenkinson, H.A. and Sands, T., Appl. Phys. Letts. 47, 691 1985.
9. Martin, G. and Makram-Ebeid, S., Acta Elec. 25, 133 1983.
10. Wilson, R.G., Betts, D.A., Sadana, D.K., Zavada, J.M. and Hunsperger, R.G., J. Appl. Phys. 57, 5006 1985.


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed