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Numerical Analysis of an Impinging Jet Reactor for the CVD and Gas-Phase Nucleation of Titania

Published online by Cambridge University Press:  15 February 2011

Suleyman A. Gokoglu ,
G. D. Stewart ,
J. Collins  and
D. E. Rosner
Suleyman A. Gokoglu
Affiliation:
NASA Lewis Research Center, Cleveland, OH 44135
G. D. Stewart
Affiliation:
Ohio Aerospace Institute, Brook Park, OH 44142
J. Collins
Affiliation:
Chemical Eng. Dept., Yale University, New Haven, CT 06520-8286
D. E. Rosner
Affiliation:
Chemical Eng. Dept., Yale University, New Haven, CT 06520-8286
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Abstract

We model a cold-wall atmospheric pressure impinging jet reactor to study the CVD and gas-phase nucleation of TiO2 from a titanium tetra-iso-propoxide (TTIP)/oxygen dilute source gas mixture in nitrogen. The mathematical model uses the computational code FIDAP and complements our recent asymptotic theory for high activation energy gas-phase reactions in thin chemically reacting sublayers. The numerical predictions highlight deviations from ideality in various regions inside the experimental reactor. Model predictions of deposition rates and the onset of gas-phase nucleation compare favorably with experiments. Although variable property effects on deposition rates are not significant (∼11% at 1000K), the reduction of rates due to Soret transport is substantial (∼75% at 1000K).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 335: Symposium Y – Metal-Organic Chemical Vapor Deposition of Electronic Ceramics , 1993 , 171
Copyright
Copyright © Materials Research Society 1994

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References

6. References

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