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A Novel X-ray Diffraction –based Technique for Complete Stress State Mapping of Packaged Silicon Dies

Published online by Cambridge University Press:  31 January 2011

Balaji Raghothamachar
Affiliation:
braghoth@notes.cc.sunysb.edu, Stony Brook University, Materials Science & Engineering, Stony Brook, New York, United States
Vishwanath Sarkar
Affiliation:
vsarkar@ic.sunysb.edu, Stony Brook University, Materials Science & Engineering, Stony Brook, New York, United States
Vladimir Noveski
Affiliation:
vladimir.noveski@intel.com, Intel Corporation, Chandler, Arizona, United States
Michael Dudley
Affiliation:
mdudley@notes.cc.sunysb.edu, United States
Sujit Sharan
Affiliation:
sujit.sharan@intel.com, Intel Corporation, Chandler, Arizona, United States
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Abstract

Fundamental understanding of the silicon stresses and their changes with traditional wire-bonded and flip chip packages is critical to address the performance and reliability improvements in new technologies. Recently we have developed a novel technique for non-destructive measurements of complete strain state (and thereby the stress state) of the single crystal (bulk Si) by tracing the relative change in direction of an x-ray beam diffracted from a stressed crystal. This is based on the relationship between the stress state in a crystal and the local lattice plane orientation. Experimentally, this can be achieved by using a large area synchrotron white beam in conjunction with a precision grid of x-ray absorbing material placed in the path of the beam. The grid breaks the X-ray beam into an array of micro-beams that are diffracted by the single crystal sample to produce an integrated x-ray topograph on which the inverse grid image is distorted due to changes in the paths of diffracted microbeams i.e. an x-ray reticulograph is created. The distortions are a result of the variations in the diffracting lattice plane orientation produced by strain present in the crystal. By measuring this distortion on multiple topographs through the electronic package and applying the ray tracing principle, the entire strain state of the silicon can be calculated and mapped for the entire sample. We have carried out stress mapping of the silicon device in the package by applying this non-destructive and non-invasive technique.

Type
Research Article
Copyright
Copyright © Materials Research Society 2009

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References

1 Slattery, O. Hayes, T. Lawton, W. Kelly, G. Lydon, C. O'Mathuna, C., J. Mater. Proc. Technol. 54 (1-4), 199 (1995).Google Scholar
2 Amagai, M. Kawasaki, E. Mat. Res. Soc. Symp. Proc. 338, Warrendale, PA, 1994)185.Google Scholar
3 Cullity, B. D.Measurement of Residual Stress,” Elements of X-ray Diffraction, (Addison-Wesley, 1978) pp. 447478.Google Scholar
4 Fujii, N. Inui, K. and Kozaki, S, Jpn. J. Appl. Phys., 36. 74117414 (1997).Google Scholar
5 Raghothamachar, B. Dhanaraj, G. Bai, J. Dudley, M. Micros. Res. & Tech., 69(5), 343358 (2006).Google Scholar
6 Lang, A. R. and Makepeace, A. P. W. J. Phys. D: Appl. Phys. 32, A97–A103 (1999).Google Scholar
7 Lang, A. R. and Makepeace, A. P. W. J. Synchrotron Rad. 3, 313315 (1996).Google Scholar
8 Kelley, A. Groves, G. W. and Kidd, P.Strain, Stress and Elasticity,” Crystallography and crystal defects, (John Wiley & Sons, Ltd., 2000) pp. 151180.Google Scholar