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Novel Luminescence Band in Silicon Implanted with Phosphorus and Boron

  • A.K. Srivastava (a1), D.K. Sharma (a1), K.L. Narasimhan (a1), D. Sarkar (a2) and V. Premchandran (a2)...

Abstract

Photoluminescence measurements on silicon implanted with boron, phosphorus, and dual implanted with phosphorus and boron are reported. A high intensity luminescence band between 0.9–1.03 eV is observed in the samples with dual implantation of boron and phosphorus. The luminescence band has similar spectral characteristics as that of the 1.018 eV W or II band which is observed in silicon samples irradiated with neutrons or ions. However the annealing behaviour of the luminescence band observed in our samples differs considerably from that of the W band, whose intensity increases on annealing at 525 K and is quenched on heating to 600 K. The luminescence band in our samples is not annealed out even at 900 C. The temperature dependence of the intensity of the luminescence band is also studied. It shows excitonic behaviour with an activation energy of 52 meV.

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1 Davies, G., Phys. Rep. 176, 84 (1989)
2 Tkachev, V.D. and Mudryi, A.V., Inst. Phys. Conf. Ser. 31, 231 (1977)
3 Kirkpatrick, C.G. and Noonan, J.R., Rad.Effects 30, 97 (1976)
4 Skolnick, M.S., Collis, A.G. and Webber, H.C., J. Lumin. 24/25 39 (1981)

Novel Luminescence Band in Silicon Implanted with Phosphorus and Boron

  • A.K. Srivastava (a1), D.K. Sharma (a1), K.L. Narasimhan (a1), D. Sarkar (a2) and V. Premchandran (a2)...

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