Skip to main content Accessibility help
×
Home

Non-contact Electrical Measurements of Sheet Resistance and Leakage Current Density for Ultra-shallow (and other) Junctions

  • Vladimir N. Faifer (a1), Michael I. Current (a1), Wojtek Walecki (a1), Vitali Souchkov (a1), Georgy Mikhaylov (a1), Phuc Van (a1), Tim Wong (a1), Tan Nguyen (a1), Jiansong Lu (a1), S.H. Lau (a1) and Ann Koo (a1)...

Abstract

A novel, non-contact method for determination of ultra-shallow junction sheet resistance and leakage current density has been developed based on monitoring the dynamics of photo-generated carriers by means of spatially separated capacitive probes. At light modulation frequencies of about 100 kHz, spatially resolved surface voltage signals give a direct measure of the junction sheet resistance, independent of the junction depth. At lower light modulation frequencies, the junction leakage current density is determined. Combining capacitive monitoring of modulated photo-generated free carriers with a precision wafer motion stage allows for rapid acquisition of sheet resistance and leakage data for efficient wafer-scale mapping applications.

Copyright

References

Hide All
1. International Technology Roadmap for Semiconductors, ITRS03, Front End Process, Table 71, http://public.itrs.net/Files/2003ITRS/Home2003.htm.
2. Graoui, H., Al-Bayati, A., Tichy, R., Proc. 14th International Conf. on Ion Implantation Technology (IIT02), IEEE 02EX505, 189192 (2003).
3. Al-Bayati, A., Graoui, H., Speer, J., Ito, H., Matsunaga, Y., Ohuchi, K., Adachi, K., Miyashita, K., Nakayama, T., Oowada, M., Toyoshima, Y., Proc. 14th International Conf. on Ion Implantation Technology (IIT02), IEEE 02EX505, 185188 (2003).
4. Claryesse, T., Vanhaeren, D., Vandervorst, W., J. Vac. Sci. Technol. B 20(1), 459466(2002).
5. Vandervorst, W., Clarysse, T., Brijs, B., Loo, R., Peytier, Y., Pawlak, B.J., Budiarto, E., Borden, P., Proc. International Conf. on Characterization of and Metrology for ULSI Technology, 2003, A.I.P. CP683, 758763 (2003).
6. Patents pending.
7. Faifer, V., Dyukov, V., Pradivtsev, A., Skurida, D., Proc. 24th Research Conf. (ESSDERC'94) I.O.P. 601604 (1994).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed