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Nitrogen Influence on the Photoluminescence Properties of Silicon Nanocrystals

  • Luigi Ferraioli (a1), Pierluigi Bellutti (a2), Nicola Daldosso (a3), Viviana Mulloni (a4) and Lorenzo Pavesi (a5)...


We have performed photoluminescence analysis of silicon rich oxide (SRO) and silicon rich oxynitride (SRON) samples deposited by plasma enhanced chemical vapor deposition (PECVD) and thermally annealed to cause the formation of silicon nanocrystals (Si-nc). Our purpose was to investigate the influence of nitrogen embedded into the oxide matrix on the photoluminescence properties of Si-nc. We found a large incorporation of silicon and a decrease of its diffusivity when the oxide is nitrogen rich. As a consequence the rate of crystallization for Si aggregates is slowed down when nitrogen is present in the oxide matrix.



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1. Ossicini, S., Pavesi, L., Priolo, F., Light Emitting Silicon for Microphotonics, Springer Tracts in Modern Physics.
2. Pavesi, L., Negro, L. Dal, Mazzoleni, C., Franzò, G., Priolo, F., Nature 408, 440 (2000).
3. Pavesi, L., J. Phys.: Condens. Matter 15, R1169 (2003).
4. Hayashi, S., Nagareda, T., Kanzawa, Y. and Yamamoto, K., Jpn. J. Appl. Phys., Part 1 32, 3840 (1993).10.1143/JJAP.32.3840
5. Kanzawa, Y., Kageyama, T., Takeoka, S., Fujii, M., Hayashi, S. and Yamamoto, K., Solid Sate Commun. 102, 533 (1997).10.1016/S0038-1098(96)00774-0
6. Shimizu-Iwayama, T., Fujita, K., Nakao, S., Saitoh, K., Fujita, T., Itoh, N., J. Apl. Phys. 75, 7779 (1994).10.1063/1.357031
7. Zhu, Jane G., White, C.W., Budai, J. D., Withrow, S. P., and Chen, Y., J. Appl. Phys. 78, 4386 (1995).10.1063/1.359843
8. Iacona, F., Franzò, G., and Spinella, C., J. Appl. Phys. 87, 1295 (2000).10.1063/1.372013
9. Iacona, F., Bongiorno, C., Spinella, C., Boninelli, S. and Priolo, F., J. Appl. Phys. 95, 3723 (2004).
10. Wolkin, M. V., Jorne, J., Fauchet, P. M., Allan, G., Delerue, C., Phys. Rev. Lett. 82, 197 (1999).
11. Luppi, M. and Ossicini, S., Phys. Rev. B 71, 035340 (2005).10.1103/PhysRevB.71.035340
12. Daldosso, N., Luppi, M., Ossicini, S., Degoli, E., Magri, R., Dalba, G., Fornasini, P., Grisenti, R., Rocca, F., Pavesi, L., Boninelli, S., Priolo, F., Spinella, C. and Iacona, F.., Phys. Rev. B 68, 085327 (2003).
13. Mulloni, V., Bellutti, P., Vanzetti, L., Surface Science 585, 137 (2005).10.1016/j.susc.2005.03.059
14. Ehara, T. and Machida, S.., Thin Solid Films 346, 275 (1999).
15. Gusev, E. P., Lu, H.-C., Garfunkel, E. L., Gustafsson, T., Green, M. L., IBM J. Res. Develop. 43, 265 (1999).
16. Santana, G., Monroy, B. M., Ortiz, A., Huerta, L., Alonso, J. C., Fandiño, J., Aguilar-Hernández, J., Hoyos, E., Cruz-Gandarilla, F., Contreras-Puentes, G., Appl. Phys. Lett. 88, 041916 (2006).10.1063/1.2164919
17. Hasegawa, S., Sakamori, S., Futatsudera, M., Inokuma, T., and Kurata, Y., J. Appl. Phys. 89, 2598 (2001).
18. Wemple, S. H., Phys. Rev. B, 7, 3767 (1973).



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