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A New Technique for Measuring Poisson's Ratio of Mems Materials

  • W. N. Sharpe (a1), K. R. Vaidyanathan (a2), Bin Yuan (a1) and R. L. Edwards (a3)

Abstract

New techniques and procedures for measuring Poisson's ratio of MEMS materials are presented. Tensile specimens of polysilicon that are 3.5 μm thick are pulled in a small test machine that has a linear air bearing to eliminate friction. Biaxial strain is measured directly by laser-based interferometry from four gold lines deposited on the specimen surface. The value of Poisson's ratio for vapor-deposited polysilicon is 0.22 +/- 0.01 as determined from 19 tests..

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A New Technique for Measuring Poisson's Ratio of Mems Materials

  • W. N. Sharpe (a1), K. R. Vaidyanathan (a2), Bin Yuan (a1) and R. L. Edwards (a3)

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