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A New Linear Array Thin Film Position Sensitive Detector (LTFPSD) for 3D Measurements

Published online by Cambridge University Press:  15 February 2011

E. Fortunato ,
F. Soares ,
G. Lavareda  and
R. Martins
E. Fortunato
Affiliation:
Materials Science Dep., Faculty of Science and Technology of New University of Lisbon and Centre of Excellence for Microelectronics and Optoelectronic Processes - CEMOP-UNINOVA Quinta da Torre, P-2825 Monte de Caparica, Portugal
F. Soares
Affiliation:
Materials Science Dep., Faculty of Science and Technology of New University of Lisbon and Centre of Excellence for Microelectronics and Optoelectronic Processes - CEMOP-UNINOVA Quinta da Torre, P-2825 Monte de Caparica, Portugal
G. Lavareda
Affiliation:
Materials Science Dep., Faculty of Science and Technology of New University of Lisbon and Centre of Excellence for Microelectronics and Optoelectronic Processes - CEMOP-UNINOVA Quinta da Torre, P-2825 Monte de Caparica, Portugal
R. Martins
Affiliation:
Materials Science Dep., Faculty of Science and Technology of New University of Lisbon and Centre of Excellence for Microelectronics and Optoelectronic Processes - CEMOP-UNINOVA Quinta da Torre, P-2825 Monte de Caparica, Portugal
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Abstract

A Linear array Thin Film Position Sensitive Detector (LTFPSD) based on hydrogenated amorphous silicon (a-Si:H) is proposed for the first time, taking advantage of the optical properties presented by a-Si:H devices we have developed a LTFPSD with 128 integrated elements able to be used in 3D inspections/measurements. Each element consists on an one-dimensional TFPSD, based on a p.i.n diode produced in a conventional PECVD system, where the doped layers are coated with thin resistive layers to establish the required device equipotentials. By proper incorporation of the LTFPSD into an optical inspection camera it will be possible to acquire information about an object/surface, through the optical cross-section method1. The main advantages of this system, when compared with the conventional CCDs, are the low complexity of hardware and software used and that the information can be continuously processed (analogue detection).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 377: Symposium A – Amorphous Silicon Technology 1995 , 1995 , 797
Copyright
Copyright © Materials Research Society 1995

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References

REFERENCES

1. Kawasaki, A., Goto, M., Yashiro, H. and Ozaki, H., Sensors & Actuators A21-A 23, 529 (1990).Google Scholar
2. Soares, F. and Martins, R. (private communication).Google Scholar
3. Fortunato, E., Vieira, M., Lavareda, G., Ferreira, L. and Martins, R., J. Non-Cryst. Solids 164–166, 797 (1993).Google Scholar
4. Martins, R. and Fortunato, E., accepted for publication at J. Appl. Phys. (1995).Google Scholar
5. Kawasaki, A. and Goto, M., Sensors & Actuators A21-A 23, 534 (1990).Google Scholar