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A New Hybrid Pvd/Omcvd Route to High‐Tc Superconducting Thin Films of Tl‐Ba‐Ca‐Cu‐O

Published online by Cambridge University Press:  28 February 2011

D. S. Richeson ,
L. M. Tonge ,
X. K. Wang ,
H. O. Marcy ,
T. J. Marks ,
J. B. Ketterson ,
R. P. H. Chang  and
C. R. Kannewurf
D. S. Richeson
Affiliation:
Department of Chemistry
L. M. Tonge
Affiliation:
Department of Chemistry
X. K. Wang
Affiliation:
Department of Physics and Astronomy
H. O. Marcy
Affiliation:
Department of Electrical Engineering and Computer Science
T. J. Marks
Affiliation:
Department of Chemistry Authors to whom correspondence should be addressed Science and Technology Center for Superconductivity and the Materials Research Center Northwestern University, Evanston IL 60208.
J. B. Ketterson
Affiliation:
Department of Physics and Astronomy Authors to whom correspondence should be addressed Science and Technology Center for Superconductivity and the Materials Research Center Northwestern University, Evanston IL 60208.
R. P. H. Chang
Affiliation:
Department of Materials Science and Engineering Authors to whom correspondence should be addressed Science and Technology Center for Superconductivity and the Materials Research Center Northwestern University, Evanston IL 60208.
C. R. Kannewurf
Affiliation:
Department of Electrical Engineering and Computer Science Authors to whom correspondence should be addressed Science and Technology Center for Superconductivity and the Materials Research Center Northwestern University, Evanston IL 60208.
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Abstract

Superconducting thin films of Tl‐Ba‐Ca‐Cu‐0 have been prepared by a unique hybrid technique that combines electron beam evaporation with organometallic chemical vapor deposition (OMCVD). Multilayer thin films of Ba‐Ca‐Cu‐O are prepared by sequential electron beam evaporation of BaF2, CaF2, and Cu sources onto single crystal MgO (100) or yttria‐stabilized zirconia (YSZ) substrates followed by annealing in a water vapor‐saturated oxygen atmosphere. Thallium is then incorporated into these films in either of two ways: (1) via OMCVD using thallium(cyclopentadienide) as the source, or (2) rapid annealing of the Ba‐Ca‐Cu‐O film in the presence of bulk thallium superconductor. The resultant films primarily consist of single phase TlBa2Ca2Cu3Ox with the Cu‐O planes preferentially oriented parallel to the substrate surface. Resistivity measurements indicate superconducting onset temperatures above 120 K with zero resistance by 104 K. By eliminating the water vapor anneal, residual fluoride, originating from the sources, may be left in the film. This leads to formation of predominantly c‐axis oriented crystallites of the TlBa2CaCu2Ox phase.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 169: Symposium M – High Temperature Superconductors: Fundamental Properties and Novel Materials Processing , 1989 , 619
Copyright
Copyright © Materials Research Society 1990

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