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Nanostructures with Group IV Nanocrystals Obtained by LPCVD and Thermal Annealing of SiGeO Layers

  • Bruno Morana (a1), Andrés Rodríguez (a2), Jesús Sangrador (a3), Tomás Rodríguez (a4), Óscar Martínez (a5), Juan Jiménez (a6) and Andreas Kling (a7)...

Abstract

Nanocrystals embedded in an oxide matrix have been fabricated by annealing SiGeO films deposited by LPCVD. The composition of the oxide layers and its evolution after annealing as well as the presence and nature of nanocrystals in the films have been studied by several experimental techniques. The results are analyzed and discussed in terms of the main deposition parameters and the annealing temperature.

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Keywords

Nanostructures with Group IV Nanocrystals Obtained by LPCVD and Thermal Annealing of SiGeO Layers

  • Bruno Morana (a1), Andrés Rodríguez (a2), Jesús Sangrador (a3), Tomás Rodríguez (a4), Óscar Martínez (a5), Juan Jiménez (a6) and Andreas Kling (a7)...

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