Skip to main content Accessibility help
×
Home

Nanostructure Fabrication Using Pulsed Lasers and Near-field Optical Properties of Sub-micron Particles

  • L. Zhang (a1), Y. F. Lu (a1), W. D. Song (a1), Y. W. Zheng (a1) and B. S. Luk'yanchuk (a1)...

Abstract

Recently, the field of nanoelectonics has evolved into a major area of investigation. In this paper, we present a novel method of nanofabrication using pulsed lasers and near-field optical properties of sub-micron particles. For this purpose, spherical silica particles were deposited on a silicon surface. After laser illumination, hillocks with size of about 150 nm were obtained at the original position of the particles. The mechanism can be explained as the enhancement of light intensity near the contact area. Since the characteristic distance between particles and substrate is smaller than the radiation wavelength and the particle size is of the order of a wavelength, particle does not simply play the role of microfocusing lens as in far-field, but possess optical resonance effect in near-field. In our work, the light intensity on the surface under the spherical particle was calculated by solving the electromagnetic boundary problem “particle on suface”.

Copyright

References

Hide All
1. Jersch, J. and Dickmann, K., Appl. Phys. Lett. 68, 6 (1994).
2. Madsen, S., Mülleborn, M., Birkelund, K., and Grey, F., Appl. Phys. Lett. 69, 544 (1996).
3. Lu, Y. F., Mai, Z. H., Zheng, Y. W., and Song, W. D., Appl. Phys. Lett. 76, 1200 (2000).
4. Gorbunov, A. A., and pompe, W., Phys. Stat. Sol. A, 145, 333 (1994).
5. Luk'yanchuk, B. S., Zheng, Y. W., and Lu, Y. F., Proc. SPIE, 4065 (2000).
6. Bobbert, P. A. and Vlieger, J., Physica A, 137, 209 (1986).
7. Bobbert, P. A., Vlieger, J., and Greef, R., Physica A, 137, 243 (1986).
8. Lu, Y. F., Zheng, Y. W., and Song, W. D., J. Appl. Phys. 87, 2404 (2000).
9. Kerker, M., The Scattering of Light (Academic Press, New York & London, 1969).
10. Münzer, H. J., Mosbacher, M., Bertsch, M., Zimmermann, J., Leiderer, P., and Boneberg, J., Journal of Microscopy (2000).

Nanostructure Fabrication Using Pulsed Lasers and Near-field Optical Properties of Sub-micron Particles

  • L. Zhang (a1), Y. F. Lu (a1), W. D. Song (a1), Y. W. Zheng (a1) and B. S. Luk'yanchuk (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed