Skip to main content Accessibility help
×
Home

My Modeling Nanocluster Formation During Ion Beam Synthesis

  • Chun-Wei Yuan (a1), Diana O. Yi (a2), Ian D. Sharp (a3), Swanee J. Shin (a4), Christopher Y. Liao (a5), Julian Guzman (a6), Joel Ager (a7), Eugene Haller (a8) and Daryl Chrzan (a9)...

Abstract

Ion beam synthesis of nanoclusters is studied via both kinetic Monte Carlo simulations and the self-consistent mean-field solution to a set of coupled rate equations. Both approaches predict a steady-state shape for the cluster size distribution that depends only on a characteristic length determined by the ratio of the effective diffusion coefficient times the effective solubility to the ion flux. The average cluster size in the steady state regime is determined by the implanted species/matrix interface energy.

Copyright

References

Hide All
1 Ratke, L. and Voorhees, P. W. Growth and Coarsening, 1st ed. (Springer-Verlag, New York, 2002).
2 Bales, G. S. and Chrzan, D. C. Phys. Rev. B 50, 6057 (1994).
3 Bales, G. S. and Zangwill, A. Phys. Rev. B 55, 1973 (1997).
4 Stroscio, J. A. and Pierce, D. T. Phys. Rev. B 49, 8522 (1994).
5 Amar, J. G. and Family, F. Phys. Rev. Lett. 74, 2066 (1995).
6 Ratsch, C. Zangwill, A. Smilauer, P. and VVedensky, D. D. Phys. Rev. Lett. 72, 3194 (1994).
7 Mo, Y. W. Kleiner, J. Webb, M. B. and Lagally, M. G. Phys. Rev. Lett. 66, 1998 (1991).
8 Pimpinelli, A. Villain, J. and Wolf, D. E. Phys. Rev. Lett. 69, 985 (1992).
9 Heinig, K. H. Müller, T., Schmidt, B. Strobel, M. and Möller, W., Appl. Phys. A 77, 17 (2003).
10 Xu, Q. Sharp, I. D. Yuan, C. W. Yi, D. O. Glaeser, A. M. Liao, C. Y. Minor, A. M. Beeman, J. W., Ridgway, M. C. Ager, J. W. III , Chrzan, D. C. et al. , Phys. Rev. Lett. 97, 155701 (2006).
11 Sharp, I. D. Yi, D. O. Xu, Q. Liao, C. Y. Beeman, J. W. Liliental-Weber, Z., Yu, K. M. Zhakarov, D. Ager, J. W. III , Chrzan, D. C. et al. , Appl. Phys. Lett. 86, 063107 (2005).
12 Cattaruzza, E. Gonella, F. Mattei, G. Mazzoldi, P. Gatteschi, D. Sangregorio, C. Falconieri, M. Salvetti, G. and Battaglin, G. Appl. Phys. Lett. 73, 1176 (1998).
13 Jiang, C. Z. and Fan, X. J. Surface and Coatings Technology 131, 330 (2000).
14 Marchi, G. D. Mattei, G. Mazzoldi, P. and Sada, C. J. Appl. Phys. 92, 4249 (2002).
15 Giulian, R. Kluth, P. Araujo, L. L. Llewellyn, D. J. and Ridgway, M. C. Appl. Phys. Lett. 91, 093115 (2007).
16 Ramaswamy, V. Haynes, T. E. White, C. W. MoberlyChan, W. J. Roorda, S. and Aziz, M. J. Nanoletters 5, 373 (2005).
17. Dearnaley, G. Nature 256, 701 (1975).
18 Shinada, T. Okamoto, S. Kobayashi, T. and Ohdomari, I. Nature 437, 1128 (2005).
19 Cowern, N. E. B. and Rafferty, C. S. MRS Bulletin 25, 39 (2000).
20 Yi, D. O. Jhon, M. H. Sharp, I. D. Xu, Q. Yuan, C. W. Liao, C. Y. Ager, J. W. III , Haller, E. E. and Chrzan, D. C. Phys. Rev. B 78, 245415 (2008).
21 Ziegler, J. F. Biersack, J. P. and Littmark, U. The Stopping and Range of Ions in Solids (Pergamon Press, New York, 1985).
22 Kissel, R. and Urbassek, H. M. Nucl. Inst. Meth. Phys. Res. B 180, 293 (2001).
23 Sharp, I. D. Xu, Q. Liao, C. Y. Yi, D. O. Beeman, J. W. Lilienthal-Weber, Z., Yu, K. M. Zakharov, D. N. Ager, J. W. III ., Chrzan, D. C. and Haller, E. E. J. Appl. Phys. 97, 124316 (2005).
24 McBrayer, J. D. Swanson, R. M. and Sigmon, T. W. J. Electrochem. Soc. 133, 1242 (1986).
25 Barenblatt, G. I. Scaling, 1st ed. (Cambridge University Press, 2003).
26 Cowern, N. E. B. Janssen, K. T. F. and Jos, H. F. F. J. Appl. Phys. 68, 6191 (1990).
27 Pelaz, L. Gilmer, G. H. Venezia, V. C. Gossman, H.-J., Jaraiz, M. and Barbolla, J. Appl. Phys. Lett. 74, 2017 (1999).
28Due to the small number of points describing this distribution, the uncertainty in the value of L for Ag is substantial.

Keywords

My Modeling Nanocluster Formation During Ion Beam Synthesis

  • Chun-Wei Yuan (a1), Diana O. Yi (a2), Ian D. Sharp (a3), Swanee J. Shin (a4), Christopher Y. Liao (a5), Julian Guzman (a6), Joel Ager (a7), Eugene Haller (a8) and Daryl Chrzan (a9)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed