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MULTILAYER X-RAY MIRRORS, A FIRST STEP TOWARDS THE CUSTOM DESIGN OF NEW MATERIAL PROPERTIES

Published online by Cambridge University Press:  28 February 2011

EBERHARD SPILLER
EBERHARD SPILLER*
Affiliation:
IBM T. J. Watson Research Center, Yorktown Heights, NY 10598, U.S.A.
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Abstract

Soft x-ray reflectivities up to a factor 104 larger than those of the best homogeneous materials have been obtained with multilayers coatings. Thickness control and boundary definition has been achieved on an atomic scale with amorphous films. We will review design, fabrication, performance and characterization of the coatings and discuss possibilities to extent these methods to the improvement of other material properties.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 56: Symposium H – Layered Structures and Epitaxy , 1985 , 419
Copyright
Copyright © Materials Research Society 1986

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