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Multilayer Transparent Conducting Oxide Thin Film Produced by Linear Combinatorial Synthesis

Published online by Cambridge University Press:  01 February 2011

Xiaonan Li
Xiaonan Li*
Affiliation:
National Renewable Energy Laboratory, 1617 Cole Boulevard, Golden, CO 80401, U.S.A
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Abstract

Multilayer transparent conducting oxide (TCO) structures consisting of alternating layers of tin oxide (SnO2) and cadmium oxide (CdO) pairs was studied. A low-pressure metalorganic chemical vapor deposition with a linear combinatorial approach was used to fabricate the libraries. Three libraries were studied with the pair thickness range covered from 500 nm to 4 nm. For pairs thicker than 150 nm, the material properties of the multilayer simply show a combination of CdO and SnO2 characteristics. When pair thinner than 70 nm, the interface effect started emerging. As pairs became thinner than 20 nm, the new compound phase was formed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 804: Symposium JJ – Combinatorial and Artificial Intelligence Methods in Materials Science II , 2003 , JJ2.4
Copyright
Copyright © Materials Research Society 2004

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References

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