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Multilayer Coatings for Focusing Hard X-ray Telescopes

Published online by Cambridge University Press:  10 February 2011

A. Ivan
Affiliation:
Harvard-Smithsonian Center for Astrophysics, Cambridge, MA MIT, Dept. of Nuclear Engr., Cambridge, MA
R. Bruni
Affiliation:
Harvard-Smithsonian Center for Astrophysics, Cambridge, MA
K. Byun
Affiliation:
Harvard University, Cambridge, MA
J. Everett
Affiliation:
Harvard-Smithsonian Center for Astrophysics, Cambridge, MA
P. Gorenstein
Affiliation:
Harvard-Smithsonian Center for Astrophysics, Cambridge, MA
S. Romaine
Affiliation:
Harvard-Smithsonian Center for Astrophysics, Cambridge, MA
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Abstract

Several multilayer test coatings for hard X-ray telescopes were fabricated using DC magnetron sputtering. The process parameters were selected from a series of trials of single layer depositions. The samples were characterized using X-ray specular reflectivity scans, AFM, and cross-sectional TEM. Additional measurements (stylus profilometry, RBS, and Auger analysis) were used in the optimization of the deposition rate and of the thin film properties (density, composition, surface/interface microroughness). The X-ray reflectivity scans showed that the combinations of reflector and spacer materials tested so far (W/Si and W/C) are suited for graded d-spacing multilayer coatings that present a constant reflectivity bandpass up to 70 keV.

Type
Research Article
Copyright
Copyright © Materials Research Society 1999

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References

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