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Multilayer Analysis by Focused MeV Ion Beam

  • M. Takai (a1), A. Kinomura (a1), M. Izumi (a1), K. Matsunaga (a1), K. Inoue (a1), K. Gamo (a1), M. Satou (a2) and S. Namba (a1)...

Abstract

A high-energy (MeV) helium ion beam has been focused down to 1 μm by a combination of piezo-driven objective slits and a magnetic quadrupole doublet. Rutherford backscattering (RBS) mapping techniques using focused MeV ion beams were, for the first time, applied to multilayered structures of metals, isolated with insulators, representing a test structure for multilayered wiring or interconnections of integrated circuits to nondestructively analyze the imperfection of the structures.

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1. Takai, M., Gamo, K., Masuda, K. and Namba, S.: Japan. J. Appl. Phys. 12, 1926 (1973)
2. Takai, M., Gamo, K., Masuda, K. and Namba, S.: Japan. J. Appl. Phys. 14, 1935 (1975)
3. Backscatterinq Spectrometry, edited by Chu, W.K., Mayer, J.W. and Nicolet, M.A. (Academic Press, New York, 1978)
4. Legge, G.J.F.: Nucl. Instrum. and Methods. 197, 243 (1982)
5. Nobiling, R.: Nucl. Instrum. and Methods. 218, 197 (1983)
6. Bayerl, P. and Eichinger, P.: Nucl. Instrum. and Methods. 149, 663 (1978)
7. Kneis, H., Martin, B., Nobiling, R., Povh, B. and Traxel, K.: Nucl. Instrum. and Methods. 197, 79 (1982)
8. Takai, M., Matsunaga, K., Inoue, K., Izumi, M., Gamo, K., Satou, M., and Namba, S., Japan. J. Appl. Phys. 26, L550 (1987)
9. Takai, M., Kinomura, A., Inoue, K., Matsunaga, K., Izumi, M., Gamo, K., Namba, S., and Satou, M., in Proc. of the Ist Intern. Conf. on Nuclear Microprobe Technoloqy and Applications, edited by Grime, G.W. and Watt, F. (to be published in Nucl. Instrum. and Methods 1988)
10. Kinomura, A., Takai, M., Inoue, K., Matsunaga, K., Izumi, M., Matsuo, T., Gamo, K., Namba, S., and Satou, M., in Proc. of the 12th Intern. Conf. on Atomic Collisions in Solids, edited by F. Fujimoto (to be published in Nucl. Instrum. and Methods 1988)

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