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Mosaic Spread of the Heteroepitaxial Structures from Renninger Scan

Published online by Cambridge University Press:  03 September 2012

S. L. Morelhão  and
L. P. Cardoso
S. L. Morelhão
Affiliation:
Instituto De Ffsica - Unicamp, CP 6165 13081, Campinas, SP, Brazil
L. P. Cardoso
Affiliation:
Instituto De Ffsica - Unicamp, CP 6165 13081, Campinas, SP, Brazil
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Abstract

In this work, a method of obtaining mosaic spread of the heteroepitaxial structures using Renninger scan (RS) peak profiles is reported. A simulation program was developed in order to account for the influence of the wavelengths, incident beam divergence, sample mosaic spread (layer and substrate) in the profile of the RS peaks. Surface three beam multiple diffraction cases with a forbidden or even very weak primary reflections are used to provide simpler intensity expressions and high intensity in RS. GaAs/Si samples have been analyzed as an application of this method.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 262: Symposium E – Defect Engineering in Semiconductor Growth, Processing and Device Technology , 1992 , 175
Copyright
Copyright © Materials Research Society 1992

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References

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