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Monte Carlo Modeling of Ion Transport Througe RF Glow Discharge Sheaths

Published online by Cambridge University Press:  28 February 2011

Donald A. Fisher ,
Brian E. Thompson  and
Herbert H. Sawin
Donald A. Fisher
Affiliation:
Central Research and Development Department, E.I.du Pont de Nemours and Company, Inc., Wilmington, DE 19898
Brian E. Thompson
Affiliation:
Dept.of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139
Herbert H. Sawin
Affiliation:
Dept.of Chemical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139
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Abstract

The transport of ions through a rf-plasma sheath was simulated using a Monte Carlo method to determine the distribution of ion bombardment energy and impingement angle.Several types of ion-molecule interactions were tested to determine their effect on the distributions: elastic hard-sphere scattering, elastic potential-field interactions (based upon reported literature values obtained by drift tube measures), and charge transfer.The type of elastic scattering does not significantly change the angular distributions; however, the scattering cross-sections changes as a function of ion energy (or sheath E/P) for the potential-field interactions.The fraction of collisions giving charge exchange makes a large difference in the simulated directionality as well as a factor of two difference in the average bombardment energy.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 68: Symposium C – Plasma Processing , 1986 , 231
Copyright
Copyright © Materials Research Society 1986

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