Skip to main content Accessibility help
×
Home

Molecular Dynamics Simulations of Nanoindentation of Silicon Nitride

  • Phillip Walsh (a1), Andrey Omeltchenko (a1), Hideaki Kikuchi (a1), Rajiv K. Kalia (a1), Aiichiro Nakano (a1) and Priya Vashishta (a1)...

Abstract

This is a report of work in progress on 10 million atom Molecular Dynamics (MD) simulations of nanoindentation of crystalline and amorphous silicon nitride (Si3N4). Nanoindentation is used to determine mechanical properties of extremely thin films such as hardness and elastic moduli. We report load-displacement curves for several Si3N4 configurations using an idealized non-deformable indenter and analyze the local stress distributions in the vicinity of the indenter tip. Preliminary results for surface adhesion using Si3N4 for both tip and substrate are also reported.

Copyright

References

Hide All
1. Pollock, H.M., in Friction Lubrication, and Wear Technology, edited by Blau, P.J., (ASM Metals Handbook 18, 1992), p. 419.
2. Burnham, N.A. and Colton, R.J., J. Vac. Sci. Technol. A 7(4), p. 2906 (1989).
3. Landman, Uzi and Luedtke, W.D., J. Vac. Sci. Technol. B 9(2), p. 414 (1990).
4. Omeltchenko, Andrey, Nakano, Aiichiro, Tsuruta, Kenji, Kalia, Rajiv K., and Vashishta, Priya, Advances in Metal and Semiconductor Clusters 4, p. 263 (1998).
5. Landman, Uzi, Luedtke, W.D., Burnham, Nancy A., Colton, Richard J., Science 248, p. 454 (1990).
6. Harrison, J.A., White, C.T., Colton, R.J., and Brenner, D.W., Surface Science 271, p. 57(1992).
7. Tuckerman, M. and Berne, B.J., J. Chem. Phys. 97(3): p. 1990 (1992)
8. Vashishta, P., Kalia, R.K., Rino, J.P., and Ebbsjo, I., Phys. Rev. B 41(17), p. 12197 (1990)
9. Vashishta, P., Kalia, R.K., and Ebbsjb, Ingvar, Phys. Rev. Lett. 75(5), p. 858 (1995)
10. Loong, C.K., Vashishta, P., Kalia, R.K., and Ebbsjo, I., Europhys. Lett. 31(4), p. 201 (1995)
11. Omeltchenko, A., Nakano, A., Kalia, R.K., and Vashishta, P., Europhys. Lett. 33(9), p.667 (1996).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed