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Modified Dislocation Structures in GexSi1-x Double Epilayers on (001)Si

Published online by Cambridge University Press:  28 February 2011

Eric P. Kvam*
Affiliation:
Materials and Chemical Sciences Division, Lawrence Berkeley Laboratory, 1 Cyclotron Road, Berkeley, CA 94720
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Abstract

Double epilayers of different compositions of GexSi1-x on (001)Si are observed to have dislocation contents which differ markedly from similar single epilayers. An initial epilayer, grown below its critical thickness, underwent substantial misfit dislocation introduction, while a second epilayer, grown at a composition where edge-type misfit dislocations are normally observed to dominate the morphology, contained mostly 60° type dislocations. It is suggested that dislocation entry into the upper, high mismatch epilayer allows many dislocations to enter the buried, low mismatch epilayer, and that this in turn affects the dislocation morphology in the upper layer through strain relief.

Type
Research Article
Copyright
Copyright © Materials Research Society 1990

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