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Modification and Study of Polymer Films Using High Energy Ion Beams

Published online by Cambridge University Press:  22 February 2011

T. Venkatesan
T. Venkatesan*
Affiliation:
At&T Bell Laboratories, Murray Hill, New Jersey 07974
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Abstract

Recent results on the effects of high energy ion beam irradiation in polymer films are reviewed in this paper. High energy ions (>10 keV/amu) deposit a large amount of energy (∼several cV/atom) in ionizing the electrons of the target atoms. This results in significant destruction of bonds in the films as a result of which polymers undergo rapid dissociation. Using a quadrupole mass spectrometer the study of transient emission of molecular species produced by an ion pulse has been shown to yield information about the diffusion and reaction kinetics of various molecules in the polymer. The fact that polymers undergo dissociation and those atoms which form volatile species are selectively depleted from the film could be utilized in producing useful inorganic composites by ion bombardment of polymers. For example, hard SiC composite films have been produced by ion beam irradiation of organo-silicon polymers. Eventually, polymer dissociation leads to a predominately carbon containing film which exhibits interesting electronic transport properties. Experiments on ion irradiated, pure carbon films indicate that a metallic form of carbon is produced from the polymer films at high irradiation doses.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 25: Symposium C – Thin Films and Interfaces II , 1983 , 209
Copyright
Copyright © Materials Research Society 1984

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References

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