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Modeling and Computer Simulation of the Thermal Field Induced by Ion Beam Irradiation of Bilayers
Published online by Cambridge University Press: 15 February 2011
Abstract
A 3D analytical model of calculation has been carried out to simulate the heat effects induced during ion beam assisted thin film deposition. The irradiation conditions enabling the growth of the film under steady conditions of temperature are discussed. Some results are presented to show the computer simulation of possible surface processing conditions.
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- Copyright © Materials Research Society 1995