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A Model for the Laser-Induced Chemical Vapor Deposition of Hydrogenated Amorphous Silicon
Published online by Cambridge University Press: 21 February 2011
Abstract
We propose a model for laser-induced chemical vapor deposition in which the growth of hydrogenated amorphous silicon (a-Si:H) thin films is rate-controlled by the gas phase homogeneous thermal dissociation of SiH4 The gas temperature is determined by a steady-state balance between energy absorbed from the laser and energy lost by thermal conduction.The film properties are primarily controlled by the substrate temperature.
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- Copyright © Materials Research Society 1984
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