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Mixed-Cation Optical Thin Films from Tailored Composition Targets

Published online by Cambridge University Press:  26 February 2011

J. F. Denatale  and
A. B. Harker
J. F. Denatale
Affiliation:
Rockwell International Science Center, 1049 Camino Dos Ri os, Thousand Oaks, CA 91360
A. B. Harker
Affiliation:
Rockwell International Science Center, 1049 Camino Dos Ri os, Thousand Oaks, CA 91360
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Abstract

Amorphous optical thin films of mixed oxides have been fabricated whose composition and optical index of refraction have been varied in a controlled manner as a function of film thickness using a single ion beam source with tailored composition targets. The microstructure, transformation behavior, and stress in the films are being studied for the systems Al2O3-TiO2, TiO2-SiO2, and ZrO2-SiO2. The technique has been found to be a convenient means of producing gradient index optical structures.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 77: Symposium D – Interfaces, Superlattices, and Thin Films , 1986 , 181
Copyright
Copyright © Materials Research Society 1987

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References

REFERENces

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