Skip to main content Accessibility help
×
Home

Microraman Study of Laser Ablated Gaas

  • C. García (a1), J. Jiménez (a1), A.C. Prieto (a1), J. Ramos (a1) and L.F. Sanz (a1)...

Abstract

Morphologic and structural changes induced by UV pulsed laser beams on GaAs are studied by means of surface inspection (optical interferometry) and MicroRaman spectroscopy. Crystal order and chemical composition (dopant distribution ) are shown to be changed by the ablation.

Copyright

References

Hide All
1 Rys, -A., Shieh, Y., Compaan, A., Yao, H. and Bhat, A.; Opt. Engineering 29, 329 (1990).
2 Imanaga, -S., Kawai, H., Kajiwara, K., Kaneko, K. and Watanabe, N.; J. Appl. Phys. 62,2381 (1987).
3 Lao, -P., Tang, W.C., Rajkumar, K.C., Guha, S., Madhukar, A., Lin, J.K. and Gunthaner, F.J.; J. Appl. Phys. 67, 6445 (1990).
4 Jiménez, -J., Martín, E., Garcia, B.J. and Piqueras, J.; Appl. Phys. A 55 566 (1992).
5 Licata, -T.J., Podlesnik, D.V., Tang, Hua and Osgood, R.M. Jr.; J. Vac. Sci. Techol. A 18, 1618 (1990).
6 Kawamura, -T. and Kamejima, T.; J. Appl. Phys. 61, 2878 (1987).
7 Jiménez, -J., González, M.A., Martin, B. and Calvo, B.; J. Cryst. Growth 103, 54 (1990).
8 Montgomery, -P.C., Fillard, J.P., Castagne, M. and Montaner, D.; Semicond. Sci. Technol. 7A, 237 (1992).
9 Pollak, -F.H.; Analitical Raman Spectroscopy. ed. by Grasselli, G.; and Bulkin, B.J.; Chemical Analysis Series, vol. 114 (J. Wiley, N4 1991) Ch6 p. 137.
10 Jiménez, -J., Martin, E., Prieto, A.C. and Torres, A.; Semicond. Sci. Technol. 7, 288 (1992)
11 Eing Davies, -D., Lorenzo, J.P. and Ryan, T.G.; Appl. Phys. Lett. 37, 612 (1980).
12 Kivillov, -D., Vichr, M. and Powell, R.A.; Appl. Phys. Lett. 50, 262 (1987)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed