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Microraman Study of Laser Ablated Gaas

  • C. García (a1), J. Jiménez (a1), A.C. Prieto (a1), J. Ramos (a1) and L.F. Sanz (a1)...


Morphologic and structural changes induced by UV pulsed laser beams on GaAs are studied by means of surface inspection (optical interferometry) and MicroRaman spectroscopy. Crystal order and chemical composition (dopant distribution ) are shown to be changed by the ablation.



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1 Rys, -A., Shieh, Y., Compaan, A., Yao, H. and Bhat, A.; Opt. Engineering 29, 329 (1990).
2 Imanaga, -S., Kawai, H., Kajiwara, K., Kaneko, K. and Watanabe, N.; J. Appl. Phys. 62,2381 (1987).
3 Lao, -P., Tang, W.C., Rajkumar, K.C., Guha, S., Madhukar, A., Lin, J.K. and Gunthaner, F.J.; J. Appl. Phys. 67, 6445 (1990).
4 Jiménez, -J., Martín, E., Garcia, B.J. and Piqueras, J.; Appl. Phys. A 55 566 (1992).
5 Licata, -T.J., Podlesnik, D.V., Tang, Hua and Osgood, R.M. Jr.; J. Vac. Sci. Techol. A 18, 1618 (1990).
6 Kawamura, -T. and Kamejima, T.; J. Appl. Phys. 61, 2878 (1987).
7 Jiménez, -J., González, M.A., Martin, B. and Calvo, B.; J. Cryst. Growth 103, 54 (1990).
8 Montgomery, -P.C., Fillard, J.P., Castagne, M. and Montaner, D.; Semicond. Sci. Technol. 7A, 237 (1992).
9 Pollak, -F.H.; Analitical Raman Spectroscopy. ed. by Grasselli, G.; and Bulkin, B.J.; Chemical Analysis Series, vol. 114 (J. Wiley, N4 1991) Ch6 p. 137.
10 Jiménez, -J., Martin, E., Prieto, A.C. and Torres, A.; Semicond. Sci. Technol. 7, 288 (1992)
11 Eing Davies, -D., Lorenzo, J.P. and Ryan, T.G.; Appl. Phys. Lett. 37, 612 (1980).
12 Kivillov, -D., Vichr, M. and Powell, R.A.; Appl. Phys. Lett. 50, 262 (1987)


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