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Microraman Spectroscopy and X-Ray Diffraction Studies of Ti-W-O Thin Films

Published online by Cambridge University Press:  10 February 2011

Luigi Sangaletti ,
Elza Bontempi ,
Laura E. Depero ,
P. Galinetto ,
Silvio Groppelli ,
Roberto Salari  and
Giorgio Sberveglieri
Luigi Sangaletti
Affiliation:
Istituto Nazionale di Fisica per la Materia and Dipartimento di Chimica e Fisica per i Materiali Università di Brescia, Via Branze, 38 - 25123 Brescia ITALY
Elza Bontempi
Affiliation:
Istituto Nazionale di Fisica per la Materia and Dipartimento di Chimica e Fisica per i Materiali Università di Brescia, Via Branze, 38 - 25123 Brescia ITALY
Laura E. Depero
Affiliation:
Istituto Nazionale di Fisica per la Materia and Dipartimento di Chimica e Fisica per i Materiali Università di Brescia, Via Branze, 38 - 25123 Brescia ITALY
P. Galinetto
Affiliation:
Istituto Nazionale di Fisica per la Materia and Dipartimento di Fisica A. Volta, Università di Pavia, Via A. Bassi, 6 - 27100 Pavia ITALY
Silvio Groppelli
Affiliation:
Istituto Nazionale di Fisica per la Materia and Dipartimento di Chimica e Fisica per i Materiali Università di Brescia, Via Branze, 38 - 25123 Brescia ITALY
Roberto Salari
Affiliation:
Istituto Nazionale di Fisica per la Materia and Dipartimento di Chimica e Fisica per i Materiali Università di Brescia, Via Branze, 38 - 25123 Brescia ITALY
Giorgio Sberveglieri
Affiliation:
Istituto Nazionale di Fisica per la Materia and Dipartimento di Chimica e Fisica per i Materiali Università di Brescia, Via Branze, 38 - 25123 Brescia ITALY
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Abstract

Thin films of the Ti-W-O system grown by r.f. reactive sputtering from a Ti-W (10%–90% weight) target have been studied by Raman and microraman spectroscopy, X-ray diffraction and scanning electron microscopy with the aim to investigate their microstructural and morphological properties. To this purpose, the kinetics of structural transformations at different temperatures (600 °C, and 800 °C) have been studied, and the effect of Ti on the WO3 lattice has been singled out. The results show that annealing at different temperatures induces a microstructural evolution from the amorphous phase of the as-deposited thin film to WO3 crystalline phases via an intermediate cubic disordered phase of WO3. The effect of Ti on this cubic phase and on the thin film morphology is also investigated with the aid of microraman and scanning electron microscopy analysis. The results show that two distinct phases arise upon long annealing treatments; namely, small crystallites belonging to the WO3 monoclinic phase are dispersed on a layer composed of a disordered cubic WO3 phase with a high Ti content.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 441: Thin Films – Structure and Morphology , 1996 , 475
Copyright
Copyright © Materials Research Society 1997

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