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Microporous Amorphous Superlattices

Published online by Cambridge University Press:  25 February 2011

H. W. Deckman ,
B. Abeles ,
J. H. Dunsmuir ,
C. B. Roxlo  and
T. Tiedje
H. W. Deckman
Affiliation:
Exxon Research and Engineering Co., Annandale, NJ 08801
B. Abeles
Affiliation:
Exxon Research and Engineering Co., Annandale, NJ 08801
J. H. Dunsmuir
Affiliation:
Exxon Research and Engineering Co., Annandale, NJ 08801
C. B. Roxlo
Affiliation:
Exxon Research and Engineering Co., Annandale, NJ 08801
T. Tiedje
Affiliation:
Exxon Research and Engineering Co., Annandale, NJ 08801
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Abstract

Lithographic fabrication techniques have been extended to the molecular dimension by using the layer pattern in deposited amorphous superlattices as an etching template for the creation of slot structures. Fabrication considerations are discussed for the formation of 10–50Å slots structures suitable for studying shape selective chemistry with fluoresence spectroscopy.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 76: Symposium C – Science and Technology of Microfabrication , 1986 , 49
Copyright
Copyright © Materials Research Society 1987

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References

REFERENCES

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