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Microelectronic Film Thickness Determination Using a Laserbased Ultrasonic Technique

  • R. Logan (a1), A. A. Maznev (a1), K. A. Nelson (a1), J. A. Rogers (a2), M. Fuchs (a3) and M. Banetv (a3)...

Abstract

A non-contact and non-destructive laser-based acoustic technique called impulsive stimulated thermal scattering (ISTS) is used to measure thicknesses of films in single-layer and multilayer assemblies such as W/Si, Ti/Si, and Ti/SiO2/Si structures. Thicknesses are determined to within a few percent accuracy with a laboratory version of the measurement apparatus, using conventional large-frame lasers and optics, and in a commercial prototype using compact diode-pumped and diode lasers and optics which all fit onto a 1-ft × 2-ft breadboard. ISTS and conventional measurements (profilometry, SEM, and 4-point resistance) are made on the same samples and the results are found to compare favorably.

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1. Estabil, J. J. and Keefer, M., Solid State Tech., April, 1995.
2. Rogers, J. A. and Nelson, K. A., J. Appl. Phys., 75, 1534 (1994).
3. Yang, Y., Nelson, K. A., and Adibi, F., J. Mater. Res. 10, 41 (1995).
4. Rogers, J. A. and Nelson, K. A., IEEE Trans. Ultrasonics, Ferroelectrics, and Frequency Control 42 (4), 555 (1995).
5. Rogers, J. A. and Nelson, K. A., Adhesion, J., 50, 1 (1995).
6. Rogers, J. A. and Nelson, K. A., J. Polym. Sci. B, 34, 861 (1996).

Microelectronic Film Thickness Determination Using a Laserbased Ultrasonic Technique

  • R. Logan (a1), A. A. Maznev (a1), K. A. Nelson (a1), J. A. Rogers (a2), M. Fuchs (a3) and M. Banetv (a3)...

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