Skip to main content Accessibility help
×
Home

Microcrystalline Silicon Films Produced by RF Magnetron Sputtering and the Effect of Diffrent Ambients on their Conductivity

  • Ratnabali Berjee (a1), A. K. Bandyopadhyay (a1), S. N. Sharma (a1), A. K. Patabyal (a1) and A.K. Barua (a1)...

Abstract

Results on characterisation of undoped, μc-Si:H films prepared by rf magnetron sputtering technique are presented. Highly conducting films (10−3 Δcm−1) were obtained at fairly low rf power density (l.2W/cm2). Critical parameters for obtaining microcrystalline phase were identified. The effect of humid ambient on film properties was looked into.

Copyright

References

Hide All
1. Kruangam, D., Hamaki, K., Nonomara, S., Okamoto, H. and Hamakawa, Y., Technical Digest of the International Photovoltaic Science and Engineering Conf., Kobe, 1984,Japan Convention Services, Tokyo, P437 (1984).
2. Moustakas, T.D., Tetrahedrally-Bonded Amorphous Semiconductors, Edited by Adler, David and Fritzsche, Hellmut (Plenum Publishing Corp.), P93 (1985).
3. Saito, N., Sannomiya, H., Yamaguchi, T. and Tanaka, N., Appl. Phys. A35, 241 (1984).
4. Ishida, H., Noda, M. and Shimizu, H., Jpn.J.Appl.Phys., 22, L73 (1983).
5. Shirafuji, J., Matsui, H., Narikawa, A., Inuishi, Y. and Tanaka, N., Solid State Commun. 45, 577 (1983).
6. Landauer, R., J. Appl. Phys. 23, 779 (1952).
7. Ibach, H., Wagner, H. and Bruchmann, D., Solid State Commun. 42, 457 (1982).
8. Tanielian, M., Chatani, M., Fritzsche, H., Smid, V. and Persans, P.D., J. Non-Cryst. Solids, 35&36, 575 (1980).

Microcrystalline Silicon Films Produced by RF Magnetron Sputtering and the Effect of Diffrent Ambients on their Conductivity

  • Ratnabali Berjee (a1), A. K. Bandyopadhyay (a1), S. N. Sharma (a1), A. K. Patabyal (a1) and A.K. Barua (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed