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Micro-ATR-IR as a Probe of BCB Layers for MCM-D/L Applications

  • C. E. Mohler (a1), A. J. G. Strandjord (a1), D. W. Castillo (a1), M. R. Stachowiak (a1), R. H. Heistand (a1), P. E. Garrou (a2) and T. G. Tessier (a3)...

Abstract

To lower the cost of multichip module packaging, hybridized substrate technologies have recently been reported which blend the desirable aspects of D and L fabrication (MCM-D/L). High performance dielectrics such as Cyclotene™3022 and photosensitive BCB have been shown to be compatible with laminate substrates used in MCM-DIL, however the cure levels of the dielectric on the laminates must be known for optimum processing.

In this paper, the capability of attenuated reflection IR microscopy (micro-ATR-IR) to probe thin films of BCB polymers is demonstrated. This technique enables the polymer layer to be probed regardless of the characteristics of the substrate. Cure levels of both Cyclotene™ 3022 and photodefinable BCB polymer films are obtained with micro-ATR-IR on both silicon and laminate substrate. Micro-ATR-IR is also used to probe a rapid thermal cure of Cyclotene Tm 3022 and photodefinable BCB layers on copper-clad polyimide laminate; these measurements cannot be made with transmission IR due to the high reflectivity of the substrate.

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Micro-ATR-IR as a Probe of BCB Layers for MCM-D/L Applications

  • C. E. Mohler (a1), A. J. G. Strandjord (a1), D. W. Castillo (a1), M. R. Stachowiak (a1), R. H. Heistand (a1), P. E. Garrou (a2) and T. G. Tessier (a3)...

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