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Microanalysis with high Spatial Resolution

Published online by Cambridge University Press:  21 February 2011

P. E. Batson ,
C. R. M. Grovenor ,
D. A. Smith  and
C. Wong
P. E. Batson
Affiliation:
IBM Thomas J. Watson Research Center, Yorktown Heights, N.Y. 10598
C. R. M. Grovenor
Affiliation:
IBM Thomas J. Watson Research Center, Yorktown Heights, N.Y. 10598
D. A. Smith
Affiliation:
IBM Thomas J. Watson Research Center, Yorktown Heights, N.Y. 10598
C. Wong
Affiliation:
IBM Thomas J. Watson Research Center, Yorktown Heights, N.Y. 10598
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Abstract

Elemental microanalysis, using x-rays and electron energy loss scattering, has been shown to be possible with electron beam probe sizes down to 0.5nm. This paper will discuss some practical problems, such as specimen drift, signal magnitude, and probe-specimen interaction when the probe is made very small. These problems have arisen in two studies: 1) an investigation of as segregation in poly-crystalline Si and 2) imaging of metal spheres with surface and bulk plasmon inelastic scattering.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 31: Symposium N – Electron Microscopy of Materials , 1983 , 33
Copyright
Copyright © Materials Research Society 2006

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References

REFERENCES

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