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Micro Tensile Tests on Aluminium Thin Films: Tensile Device and In Situ Observations

Published online by Cambridge University Press:  01 February 2011

Michel T. Ignat ,
Sabine Lay ,
Francine Roussel d'Herbey ,
Cedric Seguineau ,
Christophe Malhaire ,
Xavier Lafontan ,
Jean Michel Desmarres  and
Sebastiano Brida
Michel T. Ignat
Affiliation:
michel.ignat@inpg.fr, CNRS, Grenoble-INP, Saint Martin d'Hères, France
Sabine Lay
Affiliation:
sabine.lay@inpg.fr, CNRS, Grenoble-INP, Saint Martin d'Hères, France
Francine Roussel d'Herbey
Affiliation:
Francine.Roussel@inpg.fr, CNRS, Grenoble-INP, Saint Martin d'Hères, France
Cedric Seguineau
Affiliation:
cedric.seguineau@novamems.com, Novamems, CNES, Toulouse, France
Christophe Malhaire
Affiliation:
christophe.malhaire@insa-lyon.fr, INSA-Lyon, INL, Lyon, France
Xavier Lafontan
Affiliation:
xavier.lafontan@novamems.com, Novamems, Toulouse, France
Jean Michel Desmarres
Affiliation:
jean-michel.desmarres@cnes.fr, CNES, Toulouse, France
Sebastiano Brida
Affiliation:
sebastiano.brida@auxitrol.com, Auxitrol, Bourges, France
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Abstract

The results of micromechanical tensile experiments performed on thin aluminum samples are presented and discussed. The micro tensile test system and the design of the samples, based on finite element modeling (FEM), and their production by micromachining are briefly described. Some examples of the stress strain curves are presented. The Young's modulus and critical parameters (flow and rupture stress and strains) are reported. The micro structural changes induced by the tensile experiment were observed during and after the testing by scanning electron microscopy (SEM) and transmission electron microscopy (TEM).The results of micromechanical tensile experiments performed on thin aluminum samples are presented and discussed. The micro tensile test system and the design of the samples, based on finite element modeling (FEM), and their production by micromachining are briefly described. Some examples of the stress strain curves are presented. The Young's modulus and critical parameters (flow and rupture stress and strains) are reported. The micro structural changes induced by the tensile experiment were observed during and after the testing by scanning electron microscopy (SEM) and transmission electron microscopy (TEM).

Keywords

microelectro-mechanical (MEMS)ductilityelastic properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1139: Symposium GG – Microelectromechanical Systems–Materials and Devices II , 2008 , 1139-GG04-04
Copyright
Copyright © Materials Research Society 2009

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References

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