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Metrological Assessment of the Coefficient of Friction of Various Types of Silica Using the Motor Current During ILD-CMP

Published online by Cambridge University Press:  15 March 2011

Harald Jacobsen ,
Eric Stachowiak ,
Gerfried Zwicker ,
Wolfgang Lortz  and
Ralph Brandes
Harald Jacobsen
Affiliation:
Fraunhofer Institut für Siliziumtechnologie, Itzehoe, Germany
Eric Stachowiak
Affiliation:
Fraunhofer Institut für Siliziumtechnologie, Itzehoe, Germany
Gerfried Zwicker
Affiliation:
Fraunhofer Institut für Siliziumtechnologie, Itzehoe, Germany
Wolfgang Lortz
Affiliation:
Degussa AG, Hanau, Germany
Ralph Brandes
Affiliation:
Degussa Corporation, Piscataway, N.J., USA
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Abstract

In the work presented the coefficient of friction (COF) was firstly determined metrologically by a systematic assessment of motor currents for different products of pressure and velocity (p v). With all seven test slurries it could be shown that the inserted energy ECMP is proportional to the product of pressure and velocity. The COF of the parameter domain considered here does not depend on the inserted energy or the product of p v in a first approximation. For all tested slurries it was demonstrated that, both the COF and the removal rate (RR) behave analogously (low COF→ low RR).

Measurements of the viscosity η have shown that η is not a constant in the shear rate range relevant for CMP. Using the obtained viscosity values a mean slurry film thickness in the range of 2,5 -C 6 μm could be calculated.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 816: Symposium K – Advances in Chemical-Mechanical Polishing , 2004 , K3.3
Copyright
Copyright © Materials Research Society 2004

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References

1 Zwicker, G., Jacobsen, H., Lortz, W., Stachowiak, E., Brandes, R., “Characterisation of Oxide-CMP Slurries with Fumed-Silica Abrasive Modified by Wet-Jet Milling”, CMP-MIC, Marina del Rey, CA (USA), 2004 Google Scholar
2 Jacobsen, Harald, Evaluierung von Slurries in einem CMP-Prozess, Diplomarbeit, Itzehoe, Germany, Februar 2003 Google Scholar
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