Skip to main content Accessibility help

Method of Fast Hydrogen Passivation to Solar Cell Made of Crystalline Silicon

  • Wen-Ching Sun (a1), Jian-Hong Lin (a1), Wei-Lun Chang (a1), Tien-Heng Huang (a2), Chih-Wei Wang (a3), Jia-De Lin (a3), Chwung-Shan Kou (a3), Jian-You Lin (a4), Sheng-Wei Chen (a4), Jenn-Chang Hwang (a4) and Jon-Yiew Gan (a4)...


Plasma immersion ion implantation (PIII) is a technique of material processing and surface modification, using controllable negative high voltage pulsed bias to attract the ion generated from the plasma. The method using PIII treatment quickly improves the performance of solar cell made of crystalline silicon, including monocrystalline, multicrystalline and polycrystalline silicon. Hydrogen ions are attracted and quickly implanted into solar cell under a predetermined negative pulse voltage, thus, the passivation of the crystal defects of the solar cell can be realized in a short period. Meanwhile, the properties of the antireflection layer can not be damaged as the proper operating conditions are used. Consequently, the series resistance can be significantly reduced and the filling factor increases as a result. Both the short-circuit and the open-circuit voltage can be increased. The efficiency can be enhanced.



Hide All
1. Yagi, H, Matsukuma, K, Kokunai, S, Kida, Y, Kawakami, N, Nishinoiri, K, Saitoh, T, Shimokawa, R, Morita, K. Proceedings of the 20th IEEE PVSC, vol. 2. 1988, p. 1600.
2. Hanoka, J. I. et al. , Appl. Phys. Lett., 42, 618 (1983).
3. Feng, S. J. et al. , Appl. Phys. Lett., 53,1735 (1988).
4. Seager, C. H., Sharp, D. J., Panitz, J. K. G. and Aiello, R. V., J. Vac. Sci. Technol. 20 (1985) 430.
5. Zhao, J., Wang, A. and Green, M.A.. Prog. Photovoltaics 7, 471 (1999).
6. Stephens, A. W., Aberle, A. G., Green, M. A., J. Appl. Phys. 76, 363 (1993).
7. Dhungel, S. K., Yoo, J., Kim, K., Karunagaran, B., Materials Science in Semiconductor Processing 7, 427431 (2004)
8. Muller, J. C., Barhdadi, A., Ababou, Y. and Siffert, P., Revue Phys. Appl. 22, 649654 (1987)
9. Dekkers, H.F.W., Wolf, S. De, Agostinelli, G., Duerinckx, F., Beaucarne, G.. Sol. Energy Mater. 90, 32443250 (2006)
10. Sana, P., Rohatgi, A., Kalejs, J. P., and Bell, R. O., Appl. Phys. Lett. 64, 97 (1994).
11. Schmidt, W., Rasch, K.D., and Roy, K., 16 IEEE Photovoltaic Specialist Conference, San Diego, 1982, pages 537542,.
12. Hezel, R. and Schroner, R., J. Appl. Phys., 52(4), 3076 (1981)
13. Johnson, J. E., Ka, J. I. Hano, and Gregory, J. A., 18 IEEE Photovoltaic Specialists Conference, Las Vegas 1985, pages 11121115.
14. Spiegel, M., Tolle, R., Gerhards, C., Marckmann, C., Nussbaumer, N., Fath, P., Willeke, G., Bucher, E., 26th IEEE Photovoltaic Specialists Conference, Anaheim, 1997, pages 151154.


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed