Hostname: page-component-848d4c4894-89wxm Total loading time: 0 Render date: 2024-07-08T04:29:05.687Z Has data issue: false hasContentIssue false
  • English
  • Français

Method and Instrumentation for Nondestructive Characterization of Surface Area and Pore Size Distribution of Thin Films in Their Deposited State

Published online by Cambridge University Press:  10 February 2011

E. S. Boltz ,
Y. H. Spooner ,
S. G. Albanna ,
D. J. Taylor ,
A. R. Stallings  and
J. P. Abeyta
E. S. Boltz
Affiliation:
Marathon Sensors Inc., 3100 E. Kemper Rd., Cincinnati, OH 45241
Y. H. Spooner
Affiliation:
Superior MicroPowders, Albuquerque, NM
S. G. Albanna
Affiliation:
TPL, Inc, 3921 Academy Pkwy. North, NE, Albuquerque, NM 87120
D. J. Taylor
Affiliation:
TPL, Inc, 3921 Academy Pkwy. North, NE, Albuquerque, NM 87120
A. R. Stallings
Affiliation:
TPL, Inc, 3921 Academy Pkwy. North, NE, Albuquerque, NM 87120
J. P. Abeyta
Affiliation:
TPL, Inc, 3921 Academy Pkwy. North, NE, Albuquerque, NM 87120
Get access

Abstract

TPL has developed a method and instrumentation system for characterizing the surface area and pore size distribution of a thin-film or coating in its as-deposited state. Errors associated with destructive removal of the film are avoided and small sample sizes can be utilized with high-fidelity results.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 591 , 1999 , 231
Copyright
Copyright © Materials Research Society 2000

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1.Frye, G. C., Martin, S. J. & Ricco, A. J., “Monitoring of diffusion in real time in thin polymer films using SAW devices,” Sensors and Materials, 1–6(1989), 335–337.Google Scholar
2.Webb, P.A., Introduction to Microporosity: Technical Information for Sales Support, Micromeretics, (1990).Google Scholar
3.Kayser, H., Wied. Ann. 14, 451 (1881).Google Scholar
4.Waals, J.H.Van der, Dissertaion, Leipzig, (1873).Google Scholar
5.Langmuir, I., “The Constitution and Fundamental Properties of Solids and Liquids. Part I: Solids,” J. Am. Chem. Soc., 38, 2221–2295, (1916).Google Scholar
6.Langmuir, I., “The Adsorption of Gases on Plane Surfaces of Glass, Mica, and Platinum,” J. Am. Chem. Soc., 40, 1361–1403, (1918).Google Scholar
7.Brunauer, S., Deming, L.S., W.Ss. Deming, Teller, E., “On a Theory of the van der Waals Adsorption of Gasses,” J. Am. Chem. Soc., 62 1723–1732 (1940).Google Scholar
8.Lowell, S. and Shields, J.E., Powder Surface area and Porosity: Second Edition, Chapman and Hall, New York, (1984).Google Scholar