High quality lead titanate thin films were fabricated by spin coating on a silicon substrate. The resulting dried gel layers were uniform in thickness through 2 ' area, and polycrystalline perovskite structures developed almost crack free with a heat treatment above 500°C in films with thickness above 0.36μm.
Metastable pyrochlore structures were observed in films with thickness of 0.16,μm when heat treated at 500 and 600 °C. But these structure did not appear in films with thickness of 0.36μm.The thickness dependencein crystal structure of films was studied by varing the substrate condition and analyzing the interface between the.film and. substrate. In native oxide films on silicon substrates, amorphous dried gel layers were heterogeneously nucleated. Metastable cubic pyrochlore structure could be crystallized in amorphous native oxide (cubic property in random network structure).