Skip to main content Accessibility help
×
Home

Metal Vapour Vacuum Arc Ion Source to Synthesize Refractory Metal Silicides

  • B.X. Liu (a1), D.H. Zhu (a1), H.B. Lu (a1) and K. Tao (a1)

Abstract

Metal Vapour Vacuum Arc (MEVVA) Ion Source was employed, for the first time, to synthesize metal silicides. Refractory metal silicides NbSi2, TaSi2, WSi2 and MoSi2; were successfully formed by implanting respective metal ions into Si(111) wafers. It was found that the high current density metal ion implantation not only provided the metal components but also caused a simultaneous annealing for various metal-silicide phases to grow. When the imp ytation was conducted at 40 kV, the Nb ion current density was up to 76 μA/cm at a dose of 4×1011/cm2, and the Ta, W and Mo ion current densities were up to 65 μA/cm2 at a dose of 5×1017 ions/cm2, hexagonal NbSi2, TaSi2, MoSi2 and WSi2 were formed. Post annealing transformed the WSi2 and MoSi2 phases from hexagonal to tetragonal structure, featuring lower resistance than that of the as-implanted ones.

Copyright

References

Hide All
[1] Tu, K.N. and Mayer, J.W., in Thin Films Interfaces and Reaction, Edited by Poate, J.M., Tu, K.L.N. and Mayer, J.W. (Wiley, New York, 1978), p. 359
[2] Poate, J.M., Leamy, H.J., Sheng, T.T. and KLCeiler, G., Appl.Phys.Lett 33, 18 (1978)
[3] Shibata, T., Sigmon, T.W., Regolini, J.L. and Gibbons, J.F., J. Electrochem. Soc. 128, 637, (1981)
[4] Sigmon, T.W., Regolini, J.L., Gibbons, J.F., Lau, S.S. and Mayer, J.W., Abstract 388, p.981, The Electrochemical Society Extended Abstracts. Los Angeles, California, Oct. 14-19, 1979
[5] Tsaur, B.Y., Liau, Z.L., and Mayer, J.M., Appl. Phys. Lett. 34, 168 (1979)
[6] Tsai, M.Y., Petersson, C.S., d'Heurle, F.M. and Maniscakco, V., App. Phys. Lett. 37, 295 (1980)
[7] Ommen, A. Van, Willemsen, M. and Walters, R., Nucl.Instrum.Meth. in Phys. Res. B19/20, 742(1987)
[8] Yu, N., Zhou, Z., Zhou, W., Tsou, S. and Zhu, D., Nucl.lnstrum.Meth.in Phys. Res. B19/20, 746 (1987)
[9] Valyi, G., Ryssel, H., Ganschow, O. and Iede, R., Appl. Surf. Sci, 38, 235 (1989)
[10] Zambova, A. and Nedev, I., Vacuum 43, 223, (1992)
[11] Brown, I.G., Gavin, J.E. and MacGill, R.A., App. Phys. Lett. 47, 358 (1985)
[12] Zhang, X.J., Zhou, F.S., Zhang, H.X., Zhang, S.J., Li, Q. and Han, Z.E., Rev. Sci. Intrum. 64, 2431 (1992)
[13] Zhu, D.H., Tao, K., Pan, F. and Liu, B.X., Appl. Phys. Lett. 62, 2356 (1993)
[14] Wittower, A. and Hirvonen, J.K., NuclInstrum. & Meth. in Phys.Res. B6,78 (1985)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed